Non-volatile semiconductor memory device and semiconductor memory device

ABSTRACT

For each memory block, a predecoder for predecoding an applied address signal, an address latch circuit for latching the output signal of the predecoder, and a decode circuit for decoding an output signal of the address latch circuit and performing a memory cell selecting operation in a corresponding memory block are provided. Propagation delay of latch predecode signals can be made smaller and the margin for the internal read timing can be enlarged. In addition, the internal state of the decoder and memory cell selection circuitry are rest to an initial state when a memory cell is selected and the internal data output circuitry is reset to an initial state in accordance with a state of internal data reading. Thus, a non-volatile semiconductor memory device that can decrease address skew and realize an operation with sufficient margin is provided.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor memory device and aconstruction of a portion related to data reading for reading dataaccurately at high speed. Specifically, the present invention relates toa construction for achieving high-speed data reading in a non-volatilesemiconductor memory device.

2. Description of Background Art

A non-volatile semiconductor memory device such as a flash memory iswidely used in the field of portable equipments and the like as it canstore data in a non-volatile manner. A memory cell structure of thenon-volatile semiconductor memory device is roughly divided into astructure utilizing a stacked gate type transistor in which charges arestored in a conductive floating gate formed of polysilicon or the like,and insulating film trap type memory cell structure in which charges arestored in an insulation film such as a nitride film. In either memorycell structure, a threshold voltage of the memory cell transistor is setin accordance with the amount of trapped charges, and the data is storedin accordance with the magnitude of the threshold voltage.

Such a non-volatile semiconductor memory device is characterized in thatit has smaller area of cell occupation per bit as compared with an SRAM(Static Random Access Memory) that typically requires six transistorsper memory cell, and that a refresh operation for holding data requiredin a DRAM (dynamic Random Access Memory) is unnecessary. Storage of alarge amount of data such as sound or image is required also for anon-volatile semiconductor memory device, and hence, increase in storagecapacity thereof has been desired.

In such a non-volatile semiconductor memory device having large storagecapacity, a construction is generally used in which the memory array isdivided into a plurality of blocks, an X decoder and a Y decoder forselecting memory cells are arranged for each block, and memory cellselection is performed in a block basis. As only a selected block isoperated, power consumption can be reduced. Further, the number ofmemory cells connected to a bit line can be reduced by such blockdivision, and therefore, load of the bit line is reduced, achievinghigher speed of accessing.

Such a construction of the non-volatile semiconductor memory devicehaving large storage capacity is disclosed, for example, in “An Overviewof Flash Architectural Developments”, PROCEEDINGS of the IEEE, Vol. 91,No. 4, April 2003, pp. 523-536.

As disclosed in the reference above, in a non-volatile semiconductormemory device, an address decode circuit (including a predecode circuit)is provided for each memory array block. An address signal applied insynchronization with an external clock signal is latched by an addresslatch circuit arranged commonly to the memory array blocks, predecodedand then, supplied to each address decode circuit.

In the non-volatile semiconductor memory device, a command designatingan operation mode is supplied to an address input circuit through anaddress signal line. The address latch circuit is arranged on one endside of the memory array, in the vicinity of the address input circuit.Further, the predecode circuit is arranged on one end side of the memoryarray in the vicinity of the address latch circuit, in order to reducethe number of internal address signal lines and to reducecharging/discharging current of the internal address signal lines, andsupplies a predecode signal to each address decode circuit. Therefore,when the memory array size increases as the storage capacity increases,the signal line transmitting the internal address signal from theaddress predecode circuit to each address decode circuit becomes longerto have an increased load. Consequently, the address predecode signalcomes to have large skew, that is, difference in arrival time of addresspredecode signal becomes larger between the leading end and terminatingend of the address predecode signal transmitting line. Accordingly, amargin for the timing of starting memory cell selection becomes smaller,making it difficult to guarantee accurate memory cell selectingoperation. In order to ensure sufficient margin for the memory cellselecting operation and the data reading operation, it is necessary toset the timing of memory cell selection/data reading operation, takinginto account the worst case of arrival of the address predecode signalto the address decode circuit, which makes it difficult to achieve ahigh-speed operation.

For accurate data reading, it is necessary to correct an erroneous bitif present. Provision of the error correction function (ECC function)improves efficiency in repairing a defective bit, and hence improvesproduction yield. When the bit width of the internal read data increasesto 64 bits or to 128 bits, the number of bits for errordetection/correction must be increased for accurate errordetection/correction.

When an error of the stored data is simply to be detected, an even/oddparity bit (s) is added, and typically, 1 bit of parity bit is added onthe basis of 8-bit unit. In this case, whether there is an error or notcan be detected, dependent on whether the least significant bit of theaddition result value of the read out 8 bit data matches the parity bitor not. Parity check using even/odd parity bit (s) can detect an errorwhile it cannot specify the bit that causes the error. Therefore, errorcorrection is impossible. When an ECC code is used to realize the errordetection/correction function, typically, an ECC code typically of 7bits is added to the data of 64 bits. Here, information data and the ECCdata must be read at the same speed, to perform error detection andcorrection. In the aforementioned reference, the manner how the data bitfor error detection/correction is stored in the memory array and how thedata bit and the ECC code bit are read substantially at the same speedto achieve high-speed reading are not at all considered.

In order to achieve high-speed data reading, it is necessary toinitialize the internal circuitry at a timing as fast as possible, to beready for the next reading cycle. Generally, a non-volatilesemiconductor memory device operates in a static manner like an SRAM,for decoding an address and providing data output. In a large storagecapacity memory, signal lines in the data reading path are of differentlength, propagation time of internal data differs dependent on theposition of a selected memory cell, and hence the timing at which thedata is made definite differs for each data bit in the data outputcircuit. Therefore, in this case also, in order to read data accurately,the data reading timing and the timing for initializing the data outputpath must be set considering the worst case. Therefore, the cycle timeof data reading cannot be reduced, and it becomes difficult to achievehigh-speed reading.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a non-volatilesemiconductor memory device capable of reading data accurately at highspeed.

Another object of the present invention is to provide a semiconductormemory device having an enlarged operation margin for data reading.

According to a first aspect, the present invention provides anon-volatile semiconductor memory device including: a memory arrayhaving a plurality of memory cells, arranged in rows and columns, eachstoring data in a non-volatile manner; predecode circuitry arrangedalong one side of the memory array, for predecoding an address signaldesignating a memory cell of the memory array and generating apredecoded address signal; address latch circuitry arranged along oneside of the memory array in correspondence with the predecode circuitry,for latching the predecoded address signal from the predecode circuitry;cell selecting circuitry responsive to address latched by the addresslatch circuitry, for selecting an addressed memory cell of the memoryarray, in accordance with the latched address signal from the addresslatch circuitry; and data reading circuitry for reading data of thememory cell selected by the cell selecting circuitry in a data readingmode of operation.

According to a second aspect, the present invention provides asemiconductor memory device including: a memory array having a pluralityof memory cells arranged in rows and columns; address latch circuitryfor latching an address signal designating a memory cell of the memorycell array; cell selecting circuitry for selecting an addressed memorycell of the memory array in accordance with the latched address signalof the address latch circuitry; and data reading circuitry for readingdata of the memory cell selected by the cell selecting circuitry in adata reading mode of operation, for generating internal data. In thedata reading mode of operation, the cell selecting circuitry resets theaddress latch circuitry to the initial state, after a memory cell isselected.

According to a third aspect, the present invention provides asemiconductor memory including a memory array divided into a pluralityof memory mats. Each memory mat includes a plurality of memory cells andmemory cell selection and data reading are performed in parallel in adata reading mode of operation. Each memory mat includes a data regionfor storing data bits, and an error correction bit region for storingparity bits forming error correction codes for the data.

A predecoded signal from the predecode circuitry is latched by theaddress latch circuitry and then, the latched address signal istransmitted from the address latch circuitry to the address decodecircuit, for selecting a memory cell. The predecode circuitry and theaddress latch circuitry are arranged along one side of the memory array.Therefore, time difference of transmission of the latch address to thecell selecting circuitry can be reduced, and data reading margin can beenlarged.

Further, in the data reading cycle, after a memory cell is selected, theaddress latch circuitry is reset. Therefore, the direction of change ofthe latch address signal in the next reading cycle can be set always inone direction from the reset state (inactive state) to a state differentfrom the reset state (active state), so that occurrence ofmulti-selection state can be prevented regardless of the designatedaddress. Thus, the timing of address change can always be madesubstantially the same, and the reading timing can be made faster.

Further, as the parity bits for error correction are arranged dispersedover the memory mats, the size of the memory mats can be made the same,so that memory cell selecting lines can have substantially the sameload, and data can be read from each memory mat at substantially thesame timing. Further, in a nonvolatile semiconductor memory device, thenumber of memory cells connected to each source line can be made thesame. Therefore, increase in source line potential at the time of datareading can be suppressed, and accordingly, the current that can bedriven by the selected memory cell in each memory mat can be madeuniform. Thus, accurate data reading at high Speed becomes possible.

The foregoing and other objects, features, aspects and advantages of thepresent invention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically shows a construction of a main portion of anon-volatile semiconductor memory device according to a first embodimentof the present invention.

FIG. 2 schematically shows a structure of a memory cell used in thenon-volatile semiconductor memory device shown in FIG. 1.

FIG. 3 shows an exemplary construction of an address input circuit shownin FIG. 1.

FIG. 4 is a timing diagram representing timings of address latching anddecoding operations of the non-volatile semiconductor memory deviceshown in FIG. 1.

FIG. 5 shows a specific construction of a memory block in accordancewith a second embodiment of the present invention.

FIG. 6A schematically shows distribution of a source line current whenECC codes are arranged in a concentrated manner, and FIG. 6Bschematically shows distribution of source current when ECC codes arestored in a dispersed manner, in accordance with the first embodiment ofthe present invention.

FIG. 7 schematically shows a construction of a portion related to onesense amplifier of a non-volatile semiconductor memory device inaccordance with a third embodiment of the present invention.

FIG. 8 schematically shows constructions of a sense amplifier, aselector and a reference current supplying circuit shown in FIG. 7.

FIG. 9 is a timing diagram representing an operation of the circuitsshown in FIGS. 7 and 8.

FIG. 10 schematically shows an operation of the circuit shown in FIG. 8at the time of precharging.

FIG. 11 schematically shows circuit connection of the circuit shown inFIG. 8 at the time of a sensing operation.

FIG. 12 schematically shows a construction of a portion generating aprecharge signal, shown in FIG. 8.

FIG. 13 schematically shows a construction of a memory mat in accordancewith a fourth embodiment of the present invention.

FIG. 14 schematically shows a construction of a control gate block shownin FIG. 13.

FIG. 15 schematically shows a construction of a control gate group shownin FIG. 14.

FIG. 16 shows an example of a specific construction of an address latchcircuit and an address decode circuit in accordance with the fourthembodiment of the present invention.

FIG. 17 more specifically shows the configuration of the X decoder shownin FIG. 16.

FIG. 18 is a timing diagram representing an operation of the circuitshown in FIG. 16.

FIG. 19 is a diagram of signal waveforms showing timings in a testoperation of the circuit shown in FIG. 17.

FIG. 20 schematically shows a construction of a main portion of anon-volatile semiconductor memory device in accordance with a fifthembodiment of the present invention.

FIG. 21 is a timing diagram representing an operation of the circuitarrangement shown in FIG. 20.

FIG. 22 schematically shows a construction of an internal datatransmitting portion of the non-volatile semiconductor memory device inaccordance with the fifth embodiment of the present invention.

FIG. 23 shows an exemplary construction of a sense amplifier controlcircuit shown in FIG. 22.

FIG. 24 schematically shows a construction of an input signal generatingportion shown in FIG. 23.

FIG. 25 is a diagram of signal waveforms representing an operation ofthe circuit shown in FIG. 24.

FIG. 26 schematically shows a construction of a precharge/sense controlsignal generating circuit shown in FIG. 23.

FIG. 27 shows an exemplary configuration of a delay circuit shown inFIG. 26.

FIG. 28 shows an example of a second delay circuit shown in FIG. 26.

FIG. 29 schematically shows an equivalent construction of the circuitshown in FIG. 26 in a normal reading mode.

FIG. 30 is a timing diagram representing an operation of the circuitshown in FIG. 29.

FIG. 31 shows an exemplary construction of a Y decoder in accordancewith the fifth embodiment of the present invention.

FIG. 32 shows exemplary constructions of an output latch and an outputbuffer shown in FIG. 22.

FIG. 33 shows an exemplary construction of an output control circuitshown in FIG. 20.

FIG. 34 is a timing diagram representing an operation of the outputcontrol circuit shown in FIG. 33.

FIG. 35 schematically shows a construction of a sense amplifier band inthe fifth embodiment of the present invention.

FIG. 36 schematically shows propagation paths of an internal read dataand a monitor signal, in a sixth embodiment of the present invention.

FIG. 37 is a timing diagram representing an operation of the circuitshown in FIG. 36.

FIG. 38 schematically shows a construction of a main portion of thenon-volatile semiconductor memory device in accordance with the sixthembodiment of the present invention.

FIG. 39 is a diagram of signal waveforms representing an operation ofthe non-volatile semiconductor memory device shown in FIG. 38.

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment

FIG. 1 schematically shows a construction of a main portion of anon-volatile semiconductor memory device in accordance with the firstembodiment of the present invention.

FIG. 1 shows only the construction of the portion related to datareading, and constructions of portions related to data writing(programming) and erasure are not shown.

Referring to FIG. 1, the non-volatile semiconductor memory deviceincludes a memory array 1 having non-volatile memory cells arranged inrows and columns. Memory array 1 is divided into two memory blocks MBAand MBB. Memory blocks MBA and MBB each store information (data) bitsand parity bits for forming ECC codes for error detection/correction ofthe information bits. The parity bits are stored dispersed uniformly ineach of the memory blocks MBA and MBB.

The non-volatile semiconductor memory device further includes: anaddress input circuit 2 taking an external command CMD and an addresssignal ADD in accordance with a clock signal CLK; predecoders 3A and 3Bprovided corresponding to memory blocks MBA and MBB, respectively, forpredecoding an internal address signal from address input circuit 2;address latch circuits 4A and 4B latching predecoded signals frompredecoders 3A and 3B, respectively; and decode circuits 5A and 5Bfurther decoding the latched predecoded signals from address latchcircuits 4A and 4B, and generating selection signals for selectingmemory cells in corresponding memory blocks MBA and MBB.

Address input circuit 2 is arranged on one end side (lower side) of thememory array, takes in an external address signal in synchronizationwith the clock signal CLK to generate an internal address signal, andtransmits the internal address signal to predecoders 3A and 3B.

Predecoders 3A and 3B are activated when an address signal from addressinput circuit 2 designates the corresponding memory blocks, performpredecoding operation and generate predecoded signals, which in turn aretransmitted to corresponding address latch circuits 4A and 4B.Therefore, in memory blocks MBA and MBB, memory cell selecting operationis performed alternatively in data reading.

Predecoders 3A and 3B are provided corresponding to memory blocks MBAand MBB, respectively. Interconnection lines from address input circuit2 to predecoders 3A and to 3B have substantially the same length. Thedistance of interconnection is the same from predecoders 3A and 3B toaddress latch circuits 4A and 4B. Therefore, when the predecoded signalis transmitted from one end (lower side) of memory array 1 to the otherend side (upper side) of memory array 1, propagation delay of thepredecoded signal can be suppressed, address skew can be suppressed, andhence reading at a faster timing becomes possible.

Further, the distance of interconnection for the address signals is thesame from address latch circuits 4A and 4B to decode circuits 5A and 5B,respectively, so that the timing at which the address is made definitein memory blocks MBA and MBB can be made the same. Thus, a margin forthe decoding operation can be enlarged, achieving stable and high-speedreading.

The non-volatile semiconductor memory device further includes: an outputlatch circuit 6 receiving data of a selected memory cell of memory blockMBA or MBB through a read main bit line RMBL and generating an internaloutput data; an ECC circuit (error detection/correction circuit) 8receiving the internal output data from output latch circuit 6 through aread data bus RDB, for performing error detection/correction ofinformation bits based on parity bits; and a selector 9 selecting, fromthe information bits from ECC circuit 8, data of the number of bitscorresponding to the output data bit width, and generating an externalread data Q.

By way of example, from memory block MBA or MBB, 64 information bits and7 parity bits are read in parallel and applied to output latch circuit6. From 64 bits of data that have been subjected to errordetection/correction by ECC circuit 8, selector 9 selects 32 bits or 16bits, to generate external read data Q.

The non-volatile semiconductor memory device further includes an outputcontrol circuit 7 that resets output latch circuit 6, in accordance withthe state of transfer of data read to read main bit line RMBL. Theoutput control circuit 7 monitors the state of reading of the internalread data, and in accordance with the result of monitoring, resets theoutput latch circuit after the internal output data is reliablygenerated in accordance with the internal read data.

As the output control circuit 7 resets the output latch circuit 6 at acertain timing after the data is latched, even when the propagation timeof the internal read data differs dependent on the position of theselected memories, the latched data of output latch circuit 6 is readafter the data has been latched and read in the output latch circuit 6.Therefore, the timing of read control can be made the same regardless ofthe positions of the selected memory cells in memory array 1, andoperation margin for data reading can be enlarged.

FIG. 2 shows an exemplary structure of the non-volatile memory cellincluded in memory array 1 shown in FIG. 1. Referring to FIG. 2,non-volatile memory cell MC includes impurity regions 10 b and 10 cformed spaced apart from each other on a surface of a substrate region10 a, a control gate 10 e formed on substrate surface 10 a close toimpurity region 10 b, with a gate insulating film 10 d interposed, and amemory gate 10 f formed on insulating film 10 g, close to impurityregion 10 c. Insulating layer 10 g is formed extended between controlgate 10 e and memory gate 10 f Insulating layer 10 g is formed, forexample, of an ONO film (silicon Oxide-Nitride-Oxide film), and includesa charge trap layer 10 j formed, for example, of a silicon nitride film.

On a sidewall of memory gate 10 f, a sidewall insulating film 10 ireaching impurity region 10 c is formed. On a sidewall of control gate10 e, a sidewall insulating film 10 k reaching impurity region 10 b isformed. A low resistance metal 10 h such as Cobalt Silicide film (CoSifilm), for example, is formed on the control gate 10 e.

Impurity regions 10 b and 10 c function as drain and source,respectively, at the time of data reading, and impurity region 10 b isconnected to a bit line BL and impurity region 10 c is connected to asource line SL. Control gate 10 e is connected to a control gate lineCGL, and memory gate 10 f is connected to a word line WL. Low-resistancemetal layer 10 h on control gate 10 e lowers resistance of control gateline CGL.

In non-volatile memory cell MC shown in FIG. 2, when charges are storedin charge trap layer 10 j (in writing operation), a voltage, forexample, of 1.5V is applied to control gate line CGL, and a high voltageof, for example, 11V is applied to word line WL, so as to form a channelbelow control gate 10 e. Substrate region 10 a is held at the groundpotential level. At the time of writing, a voltage, for example, of 5.5Vis applied to source line SL, and a constant current source is connectedto the drain through bit line BL. A current is caused to flow fromsource line SL to bit line BL, so that electric field is concentrated insubstrate region 10 a between control gate 10 e and memory gate 10 f Bythe high electric field, hot carriers (electrons) are generated and thegenerated hot carriers are accelerated in accordance with the voltageapplied to memory gate 10 f, and captured in charge trap layer 10 j(source side injection). By this writing operation, the thresholdvoltage of the memory cell is set to a voltage level higher than thememory gate voltage (for example, 1.5V) applied at the time of datareading.

In erasure, impurity region (drain) 10 b is set to an open state,control gate 10 e is set to the ground voltage level through controlgate line CGL, and substrate region 10 a is kept at the ground voltagelevel. A negative voltage of, for example, −6V is applied to memory gate10 f through word line WL, and a voltage of 5.5V, for example, isapplied to impurity region (source) 10 c through source line SL. In thisstate, hot carriers (holes) generated by the high electric field belowmemory gate 10 f are injected to charge trap layer 10 j, attracted bythe negative voltage of memory gate 10 f and combined to the trappedelectrons, so that electrons stored in the charge trap layer 10 j areneutralized. By this erasing operation, the threshold voltage of thememory cell decreases to a voltage level lower than the memory gatevoltage applied at the time of reading.

In data reading, a read voltage of 1.5V is applied to memory gate 10 f,and impurity region 10 c is kept at the ground voltage level. Toimpurity region 10 b, a read voltage of about 1.5V is supplied throughbit line BL. To control gate 10 e, 1.5V is applied through control gateline CGL. Dependent on the amount of accumulated carriers in charge traplayer 10 j, memory cell MC assumes either a state in which the thresholdvoltage has large absolute value, or a state in which the thresholdvalue has small absolute value, in the case when binary data is stored.

When control gate line CGL is driven to the selected state, a channel isformed below control gate 10 e. When electrons are trapped in chargetrap layer 10 j and the threshold voltage is high (for the case of Nchannel transistor), an inversion layer is not formed below charge traplayer 10 j, and therefore, a current does not flow between impurityregions 10 b and 10 c. On the other hand, when the amount of electronstrapped in charge trap layer 10 j is small because of hole injection orwhen the amount of holes is large and the threshold voltage is low (forthe case of N channel transistor), an inversion layer is formed belowcharge trap layer 10 j, and a current flows between impurity regions 10b and 10 c. By sensing the amount of current flowing through bit lineBL, the data stored in non-volatile memory cell MC is read.

The structure of non-volatile memory cell MC is not limited to the oneshown in FIG. 2, and other memory cell structures may be used. Further,different methods may be employed for the method of writing/erasingdata. By way of example, by discharging the electrons trapped in chargetrap layer 10 j to substrate region 10 a or to memory gate 10 f, erasuremay be performed.

Further, the erased state of the memory cell may be the state havinghigh threshold voltage, and the written state may be the state of lowthreshold voltage.

In the memory cell structure, a memory transistor for storing data and aselection transistor for selecting the memory transistor are connectedin series between the bit line and the source line. Therefore, even whenthe memory transistor enters an over-erased state and the thresholdvoltage attains negative, data reading of the selected memory cell isnot affected by the over-erased cell, as long as the selectiontransistor is in a non-conductive state. Therefore, the step ofadjusting threshold voltage to prevent the over-erased state becomesunnecessary, and thus, the time for writing can be reduced. Further, theinfluence of the over-erased cell on the data reading can be suppressed,and a defective cell can be repaired simply by replacement with aredundant cell.

FIG. 3 shows an exemplary construction of address input circuit 2 shownin FIG. 1. Referring to FIG. 3, address input circuit 2 includes aninverter 2 a inverting the clock signal CLK, an AND gate 2 b receivingthe clock signal CLK and an external address signal ADD, an AND gate 2 creceiving an output signal from inverter 2 a and an external commandCMD, and an NOR gate 2 d receiving output signals from AND gates 2 b and2 c and generating an internal address signal IADD. These gates 2 b to 2d are formed by a composite gate.

In the address input circuit 2 shown in FIG. 3, when clock signal CLK isat an H level (logical high level), internal address signal IADD isgenerated in accordance with the external address signal ADD. When theclock signal CLK attains to an L level (logical low level), the outputsignal of inverter 2 a attains to the H level, and based on command CMD,internal address IADD is generated and applied to predecoders 3A and 3Bshown in FIG. 1. Command CMD and address signal ADD are generallyapplied through a common terminal. Command CMD designates an operationmode such as data writing, erasure, and test mode. When command CMD isapplied, internal address signal IADD is applied, as a command, to asequence controller, not shown, and decoded, whereby the designatedoperation is executed.

In address input circuit 2, by taking the command CMD and the addresssignal ADD at different phases of the clock signal CLK, the addresssignal and the command can surely be distinguished from each other, evenwhen an operation mode (write or erase) is designated in accordance witha write enable signal.

FIG. 4 schematically shows propagation waveforms of the address signalin the non-volatile semiconductor memory device shown in FIG. 1. Inresponse to a rise of clock signal CLK, address input circuit 2generates, from external address signal ADD, an internal address signalIADD. Interconnection distance from address input circuit 2 topredecoder 3A is substantially the same as that to predecoder 3B, andtherefore, predecoders 3A and 3B start predecoding operationsubstantially at the same timing. The predecoded signals are transmittedto corresponding address latch circuits 4A and 4B. Therefore, in aselected memory block, only the predecoded address signal is transmittedfrom an associated predecoder over a short interconnection distance, andtherefore, it can be transmitted stably with small skew to the addresslatch circuit. Therefore, address latch timing in address latch circuits4A and 4B can be set faster.

The latch predecoded signal is simply transmitted from address latchcircuit 4A or 4B to the corresponding decode circuit 5A or 5B, and theinterconnection distance therebetween is short. Therefore, when decodecircuit 5A or 5B generates a decode signal in accordance with thelatched address, high speed transmission is possible, and hence, addressdecode circuit 5A or 5B can perform the decoding operation and generatethe decode signal at a faster timing. Therefore, in this case also, thedecode signal can be generated from the latched address from addresslatch circuits 3A and 3B and can attain to the definite state in a shortperiod of time, and hence, the decode signal can be driven to thedefinite and settled state at high speed. Accordingly, the margin forreading operation can be enlarged, and the timing for starting thereading operation can be made faster. Thus, high-speed reading becomespossible.

As described above, according to the first embodiment of the presentinvention, the memory array is divided into memory blocks, and for eachmemory block, a predecoder, an address latch circuit and an addressdecode circuit are arranged, whereby the address decoding operation canbe performed in accordance with the internal address signal transmittedwith sufficiently small skew from the address input circuit.Consequently, the margin for the timing of starting a reading operationcan be enlarged, and accurate and high-speed reading is achieved.

Second Embodiment

FIG. 5 more schematically shows the construction of memory array 1 anddecode circuits 5 a and 5 b shown in FIG. 1. FIG. 5 shows a constructionin one memory block of memory blocks MBA and MBB of memory array 1.Memory block MB (MBA or MBB) includes 8 memory mats MM0U-MM3U andMM0L-MM3L. Each of the memory mats MM0U-MM3U and MMOL-MM3L includes aninformation bit region IBR for storing information (data) bits and aparity region PBR for storing parity bits. In information bit regionIBR, 16 bit line blocks each including 32 bit lines (subbit lines) areprovided, and a total of 512 bit lines (subbit lines) are arranged.

Decode circuit 5 (5A or 5B) includes an X decoder 12 u providedcorresponding to memory mats MM0U-MM3U arranged in alignment in a rowextending direction, an X decoder 12 l provided corresponding to memorymats MM0L-MM3L arranged in the row extending direction, and a Y decoder13. X decoders 12 u and 12 l decode a latched address (predecode addresssignal) from corresponding address latch circuit 4, and based on theresult of decoding, drive a control gate line through a driver includedin a driver band 14.

The control gate line from X decoder 12 u is arranged extending commonlyto corresponding memory mats MM0U-MM3U. A control gate driving signalapplied from X decoder 12 l through driver band 14 is commonly appliedto memory mats M0L-M3L, One of X decoders 12 u and 12 l is selected, andeither in the upper memory mats MM0U-MM3U or in lower memory matsMM0L-MM3L, a control gate line is driven to a selected state.

It is noted, however, that one of the memory blocks MBA and MBB isdriven to the selected state, and the control gate lines are notsimultaneously driven to the selected state in both of the blocks.

Further, as will be described in detail later, in one memory block, twosets of memory mats MM0U-MM3U and MM0L-MM3L shown in FIG. 5 arearranged. In the second embodiment, for simplicity of drawings, only oneset of memory mat trains MM0U-MM3U and MM0L-MM3L is shown.

Corresponding to memory mats MM0U-MM3U, selectors YG0U-YG3U areprovided, for selecting a corresponding bit line in accordance with a Yselection signal from Y decoder 13, and corresponding to memory matsMM0L-MM3L, selectors YG0L-YG3L are provided, each for selecting a column(bit line) from a respective memory mat. Between these selectorsYG0U-YG3U and selectors YG0L-YG3L, sense amplifier circuits SK0-SK3 forsensing and amplifying selected memory cell data in accordance with asense amplifier enabling signal from Y decoder 13 are provided.

In data reading, in each of memory mats MM0U-MM3U or MM0L-MM3L, 16information bits are read, and a total of 64 information bits are read.For detecting and correcting any error in 64 bits of information, an ECCcode of 7 bits is used. The ECC code is formed by dividing 64information bits into 7 sets of bits in accordance with a prescribedalgorithm, and by finding a parity bit for the bits of each divided set.The parity bits forming the ECC code are arranged uniformly dispersedover memory mats MM0U-MM3U or MM0L-MM3L. Specifically, in each of memorymats MM0U-MM2U, 2 parity bits are stored in the parity region PBR, andin memory mat MM0U, 1 parity bit is stored in the parity region PBR. Thelength MML of each of memory mats MM0U-MM3U and MM0L-MM3L is set to beas equal as possible among the memory mats.

Between memory mats MM0U-MM3U and MM0L-MM3L, source line driver portionsSLD0-SLD2 are provided. These source line driver portions SLD0-SLD2supply a prescribed voltage to the source lines in writing or erasingdata. In data reading, source line driver portions SLD0-SLD2 maintainthe source lines of the corresponding memory mats at the ground voltagelevel. As the parity bits are stored being uniformly dispersed overmemory mats MM0U-MM3U and MM0L-MM3L, the following effects can beprovided.

Assume that the ECC code is arranged concentrated on one memory mat MM,as shown in FIG. 6A. In this case, in data reading, common source lineCSL is coupled to the ground potential at the source line driver portionSLD, as shown in FIG. 6A. The common source line CSL is arrangedextending commonly over information bit region IBR and parity bit regionPBR in one memory mat. At the time of data reading, 16 bits of memorycells MC0-MC15 are coupled to common source line CSL in the informationbit region IBR, and 7 bits of memory cells MC16-MC22 are coupled tocommon source line CSL in the parity bit region PBR. Reading of data isperformed by sensing a magnitude of a memory cell current Im flowingfrom bit line BL through memory cells MC (MC0-MC22).

Here, as there is a line resistance Rp of common source line CSL, in thecase when a total of 23 memory cells are coupled, the common source lineCSL becomes longer and comes to have larger line resistance Rp.Therefore, when the memory cell current Im flows, the potential of thecommon source line CSL floats up much greater, because of the large lineresistance and the increase in current resulting from the increasednumber of memory cells through which the memory cell current flows. As aresult, source potential distribution occurs among memory cellsMC0-MC22, and possibly the magnitude of memory current Im to be drivenin the state of same threshold voltage may differ. Particularly, in amemory cell at which the source line potential floats up significantly,the memory cell current Im becomes smaller, and therefore, a statehaving a small threshold voltage may possibly be determined erroneouslyas a state having large threshold voltage.

When the parity bit region PBR is arranged uniformly in each memory matas shown in FIG. 6B, it follows that the memory cells MC16 and MC17storing parity bits of at most 2 bits are coupled to one common sourceline CSL, through which the memory cell current Im flows. In this case,the length of common source line CSL becomes shorter than in FIG. 6A,line resistance Rpp becomes smaller, and the driving source line currentis also reduced. Therefore, floating up of the potential of commonsource line CSL can be suppressed, the memory cell current Imcorresponding to the threshold voltage of the memory cell can be drivenstably, and accurate data reading is achieved.

Therefore, when the memory mat MM is set to have the equal length ML asshown in FIG. 5, the length of the common source line CSL can be madeequal, variation in floating up of the source potential among memorycells of a memory mat can be suppressed, and stable data reading becomespossible.

The arrangement of the common source line CSL is similar in ahierarchical structure having a sub source line connected common tomemory cells MC connected to 32 bit lines BL and a global source linearranged common to the sub source lines of the memory mat. Floating upof potential of the global source line is transmitted to the common subsource line, causing the same problem. Therefore, by arranging thememory cells storing parity bits uniformly dispersed over a plurality ofmemory mats, the number of selected memory cells connected to one globalsource line can be made uniform, and the variation in source potentialcan be suppressed.

Further, the number of selected memory cells connected to the commonsource line CSL becomes smaller, the total sum of memory cell currentsIm flowing into the common source line is reduced, and accordingly,floating up of the potential of common source line CSL can further besuppressed.

In the construction described above, 64 bits of data are storeddispersedly in four memory mats. The bit width of information (data) maybe of a different size, and the number of divided memory mats is notlimited to 4, and may be 8 or other number of divisions.

As described above, according to the second embodiment of the presentinvention, the parity bits of the ECC code are stored uniformlydispersed over divided regions of the memory block, that is, over aplurality of memory mats, and in each memory mat, the memory cellcurrent flowing into a source line and a source line resistance can bemade uniform, for each of the source line driver portions SDL0-SDL3.Thus, floating up of the potential of the common source line can besuppressed. Accordingly, sufficient memory cell current flows in eachmemory cell, enabling accurate and high speed data reading.

Third Embodiment

FIG. 7 schematically shows a construction of a portion for reading 1 bitof internal data, of the non-volatile semiconductor memory deviceaccording to the third embodiment of the present invention. In FIG. 7, aconstruction of a portion for reading 1 bit of memory cell data frommemory mats MMk and MMj is shown as a representative. Memory mats MMkand MMj correspond to the memory mat MMU (MM0U-MM3U) and MML (MM0L-MM3L)shown in FIG. 5.

In each of memory mats MMk and NMj, one bit line (subbit line) isselected from 32 bit lines (subbit lines) SBL. Here, 32 subbit lines aredivided into subbit line groups BLG0-BLG3 each including 8 subbit linesSBL. A memory cell is connected to a subbit line SBL. Here, in aninternal data reading path, the data is successively transmitted throughthe common bit line to the main bit line, and therefore, the bit line towhich the memory cell is connected will be referred to as the subbitline.

In memory mat MMk, there are provided a first selector 20 k forselecting one subbit line in accordance with a Y selection signal YRAfrom each of the subbit line groups BLG0-BLG3, and a second selector 21k for selecting one subbit line from four subbit lines selected by thefirst selector 20 k in accordance with a Y selection signal YRB.Similarly, in memory mat MMj, there are provided a first selector 20 jfor selecting 1 bit of subbit line in accordance with the Y selectionsignal YRA from each of the subbit line groups BLG0-BLG3, and a secondselector 21 j for selecting one subbit line from the four subbit linesselected by the first selector 20 j in accordance with the Y selectionsignal YRB.

The first selector 20 k and the second selector 21 k are included in aset of selectors YG0U-YG3U or selectors YG0L-YG3L shown in FIG. 5, andthe first selector 20 j and the second selector 21 j are included in theother set of selectors.

To the data lines (common bit lines) between the first selector 20 k andthe second selector 21 k and to the common bit lines between the firstselector 20 j and the second selector 21 j, reference current supplyingcircuits VRF0-VRF3 are coupled, respectively. In accordance with a blockselection signal RFBS, these reference current supplying circuitsVRF0-VRF3 supply a reference current to (extract the reference currentfrom) the unselected memory mats.

Outputs of the second selectors 21 k and 21 j are coupled to a senseamplifier circuit SA. The sense amplifier circuit SA differentiallyamplifies a current flowing through the common bit lines selected by thesecond selectors 21 k and 21 j, in accordance with activation of a senseamplifier activating signal (sense amplifier enabling signal) SAE, anddrives sense output lines (internal data read lines) Ibk and Ibj inaccordance with the result of amplification. The internal read datalines Ibk and Ibj are coupled to an internal read buffer circuit, notshown, and the sense amplifier circuit output signal is furtheramplified, so that the amplified internal read data is transmitted tooutput latch circuit 6 (see FIG. 1).

In memory mats MMk and MMj, 16 sets of subbit line groups BLG0-BLG3 areprovided in the information bit region, and 1 bit of memory cell isselected in each set, so that a total of 16 bits of memory cell data(information bits) are read. Similar construction is provided in theparity region, and 1 bit or 2 bits of parity bits are readsimultaneously in parallel.

FIG. 8 more specifically shows the configuration of the selectors, thereference current supplying circuits and the sense amplifier circuit fortwo subbit line groups in the internal data reading portion shown inFIG. 7. Referring to FIG. 8, in each of memory mats MMk and MMj, subbitline group BLG0 includes subbit lines SBL0-SBL7 and subbit line groupBLG1 includes subbit lines SBL8-SBL15.

Each of the first selectors 20 k and 20 j includes subbit line selectinggates T0-T7 formed of P channel MOS transistors provided correspondingto 8 subbit lines of each subbit line group. To the subbit lineselecting gates T0-T7, first Y selection signals yra <0>-yra <7> areapplied, respectively. One of the first Y selection signals yra <0>-yra<7> is set to a selected state (L level), one of the subbit lineselecting gates T0-T7 is set to the selected state, and the selectedsubbit line is coupled to the corresponding common bit line. When the Yselection signal yra <0> attains to the selected state of L level,subbit line selecting gate T0 is rendered conductive, and subbit linesSBL0 and SBL8 are coupled to common bit lines CBL0 (CBLk0, CBLj0) andCBL1 (CBLk1, CBLj1), respectively. The common bit lines are arrangedcorresponding to each subbit line group, and the selected subbit line ofeach subbit line group is coupled to the corresponding common bit line.

The first Y selection signals yra <0>-yra <7> correspond to Y selectionsignal YRA shown in FIG. 7.

Each of the second selectors 21 k and 21 j includes common bit lineselecting gates G0-G3 formed of P channel MOS transistors providedcorresponding to common bit lines CBL0 (CBLk0, CBLJ0)-CBL3 (CBLk3,CBLj3), respectively. To the gates of these common bit line selectinggates G0-G3, second Y selection signals yrb <0>-yrb <3> are applied,respectively. These second Y selection signals yrb <0>-yrb <3>correspond to the Y selection signal YRB shown in FIG. 7.

One of the second Y selection signals yrb <0>-yrb <3> is driven to theselected state, a corresponding one of the common bit line selectinggates G0-G3 is turned on and the corresponding one of the common bitlines CBLk0-CBLk3 and the corresponding one of common bit linesCBLj0-CBLj3 are coupled to the sense amplifier circuit SA.

Reference current supplying circuit VRF0 is coupled to common bit linesCBLk0 and CBLj0, and reference current supplying circuit VRF1 is coupledto common bit lines CBLk1 and CBLj1. Reference current supplyingcircuits VRF0 and VRF1 have the same construction, and correspondingcomponents are denoted by the same reference characters.

Reference current supplying circuit VRF0 includes: P channel MOStransistors PG1 and PG2 rendered conductive in response to a prechargedesignating signal pc<0> and coupling common bit lines CBLk0 and CBLj0to a power supply node when made conductive; a P channel MOS transistorPG0 isolating the common bit lines CBLk0 and CBLj0 in response toprecharge designating signal pc<0>; an N channel MOS transistor NG1receiving, at its gate, a reference voltage Vmsg; a P channel MOStransistor PG4 coupling N channel MOS transistor NG1 to common bit lineCBLj in response to a reference block selection signal VFDCjN; and a Pchannel MOS transistor PG3 rendered conductive in response to thereference block selection signal VFDCkN and coupling N channel MOStransistor NG1 to common bit line CBLk0 when made conductive.

Similarly, reference current supplying circuit VRF1 includes:precharging P channel MOS transistors PG1 and PG2 coupling common bitlines CBLk1 and CBLj1 to a power supply node in response to a prechargedesignating signal pc<1>; a P channel MOS transistor PG0 isolating thecommon bit lines CBLk1 and CBLj1 in response to the prechargedesignating signal pc<1>; an N channel MOS transistor NG1 receiving, atits gate, the reference voltage Vmsg and serving as a constant currentsource; and P channel MOS transistors PG4 and PG3 coupling N channel MOStransistor NG1 to common bit lines CBLk1 and CBLj1 in accordance withthe reference block selection signals VFDCjN and VFDCkN, respectively.

In these reference current supplying circuits VRF0 and VRF1, when theprecharge designating signals pc<0> and pc<1> are at the active state ofL level, common bit lines CBLk0 and CBLj0 are precharged to andequalized at the power supply voltage level, and common bit lines CBLk1and CBLj1 are precharged to and equalized at the power supply voltagelevel, by P channel MOS transistors PG0-PG2. When the prechargedesignating signals pc<0> and pc<1> attain to the inactive state of Hlevel, the precharging operation is finished, and the equalizingoperation of the common bit lines is finished.

In data reading, one of the reference block selection signals VFDCjN andVFDCkN attains to the active state of L level. Therefore, the common bitlines are discharged through constant current source MOS transistor NG1to the memory mat different from the memory mat including the selectedmemory cell, that is, the reference block. FIG. 8 shows, as an example,a state in which no memory cell is selected in memory mat MMk, throughthe selected subbit line selecting gate of the first selector 20 k, thecharging subbit line current is discharged through the reference currentsupplying circuit VRF0, and in memory mat MMj, the precharged currentflows on the subbit line SBL through the selected memory cell.

The reference current driven by the reference current supplying circuitVRF0 or VRF1 is compared with the subbit line current driven by thememory cell, by the sense amplifier circuit SA.

The sense amplifier circuit SA includes a P channel MOS transistor PG5and an N channel MOS transistor NG4 rendered conductive when the senseamplifier activating signal SAE is active (at H level); a P channel MOStransistor PG6 and an N channel MOS transistor NG3 connected between MOStransistors PG5 and NG4 and forming a CMOS inverter; and a P channel MOStransistor PG7 and an N channel MOS transistor NG2 connected between MOStransistors PG5 and NG4 and forming a CMOS inverter. MOS transistors PG6and NG3 have their gates coupled to sense output line (internal dataread line) Ibj, and MOS transistors PG7 and NG2 have their gates coupledto sense output line (internal data read line) Ibk.

Sense amplifier circuit SA further includes a P channel MOS transistorPG8 precharging a common source node of MOS transistors NG2 and NG3 tothe level of the power supply potential, when the sense amplifieractivating signal SAE is rendered inactive.

The sense amplifier circuit SA is a CMOS inverter latch circuit, and bythe cross-coupled MOS transistors PG6 and PG7 and cross-coupled Nchannel MOS transistors NG3 and NG2, it differentially amplifies andlatches the potentials of sense output lines Ibk and Ibj reflecting thedifference between the memory cell current and the reference current.

Therefore, through sense output lines (internal data read lines) Ibk andIbj, complementary differential signals are transmitted. The potentialson sense output lines Ibk and Iblj are amplified by an internal readbuffer circuit, not shown, and transmitted to a read main bit line.

The current, ire, driven by reference current supplying circuits VRF0and VRF1 is set to a current level of an intermediate value (½) betweenthe current driven by a memory cell storing data of H level and acurrent driven by a memory cell storing L level. By comparing thereference current, ire, with the memory cell current Im, the data storedin the selected memory cell can be read.

Here, the correspondence between the threshold voltage of the memorycell and data of H and L levels may be appropriately defined.Specifically, the state of high threshold voltage and the state of lowthreshold voltage may correspond to the H level data and L level data,respectively, or vice versa. Further, the correspondence between thewritten (programmed) state and erased state and the state of highthreshold voltage and the state of low threshold voltage may beappropriately defined, as described above.

FIG. 9 is a timing diagram representing an operation of the internaldata reading portion shown in FIG. 8.

The operation of the internal data reading portion shown in FIG. 8 willbe described with reference to FIG. 9.

In synchronization with a rise of a main clock signal CKM (clock signalCLK), an internal address signal is generated from the address inputcircuit, transmitted through a predecoder to the address latch circuit,and a latch address (predecoded address) signal LADD output from theaddress latch circuit is made definite (see FIGS. 1 and 5).

When the main clock signal CKM rises, the address latch circuit is setin the latch state and the latched address signal LADD is made definiteand settled, a subbit line discharge signal, dc, is driven to the Llevel, and an internal data reading cycle starts. In this state, memorycell selecting operation is not yet performed in the memory mat, thecontrol gate signals cg <N:0> driving the control gate lines CGL are allat the L level, and the memory cells are all at the unselected state. Inone memory mat, as an example, 256 control gate lines are arranged(N=255).

The precharge signals pc <3:0> are all at the H level, and referencecurrent supplying circuits VRF0-VRF3 are all inactive. Further, thesense amplifier activating signal SAE is also at the L level, and senseamplifier circuit SA is in the inactive state, as MOS transistors PG5and NG4 are off.

Further, subbit lines SBL <511:0> (512 subbit lines for storinginformation bits in one memory mat) are all at the unselected state of Llevel.

When the internal read cycle starts, first, by the Y decoder, one commonbit line selection signal among the second Y selection signals (commonbit line selection signals) yrb <3:0> is driven to the selected state (Llevel), and in each of the second selectors 21 k and 21 j, one of thecommon bit line selecting gates G0-G3 is set to the on state, and thesense amplifier circuit SA is coupled to the selected common bit lines.

After a prescribed time period AT from settlement of the common bit lineselection signals yrb <3:0>, the first Y selection signals (subbit lineselection signals) yra <7:0> are driven to the definite state similarlyby the Y decoder. By the subbit line selection signals yra <7:0>, in thefirst selectors 20 k and 20 j, one of the subbit line selecting gatesT0-T7 is rendered conductive, and corresponding subbit lines areconnected to the corresponding common bit lines, respectively. To thecommon bit lines CBL0-CBL3, reference current supplying circuitsVRF0-VRF3 are coupled, respectively. Based on the common bit lineselection signals yrb <3:0> and a precharge end enable signal pcend, oneof the precharge signals pc <3:0> is driven to the selected state. InFIG. 9, the selected state is denoted by “sel” and the unselected stateis denoted by “usel”. Consequently, the reference current supplyingcircuit connected to the common bit line coupled to the sense amplifiercircuit is activated, the common bit line is precharged to a prescribedvoltage (power supply voltage) by MOS transistors PG0-PG2, the prechargecurrent is supplied to the selected subbit line, and the voltage levelof the selected subbit line SBL increases. In this case, in each of thememory mats MMk and MMj, precharge current is supplied to the subbitline of the same position, and the potential of the selected subbit lineincreases to the H level. At the time of precharging operation, in thereference current supplying circuit VRF (any of VRF0-VRF3), MOStransistors PG3 and PG4 are both on, and therefore, the referencecurrent is driven in accordance with the reference voltage Vmsg.

When the selected subbit line is precharged to a prescribed voltagelevel, one of the reference block selection signals VFDCjN and VFDCkNattains to the H level immediately before the start of decodingoperation by the X decoder, and in the reference current supplyingcircuit, one of the MOS transistors PG3 and PG4 turns off, so that thecommon bit line of the selected memory mat is isolated from MOStransistor NG1 serving as the constant current source.

Then, X decoders 12 u and 12 l shown in FIG. 5 perform the decodingoperation, and drive one of the control gate signals cg <N:0> to theselected state. The control gate signals cg <N:0> are transmitted to thecontrol gate lines (CGL) to each of which memory cells are connected,and in the memory cell connected to the selected control gate line, aninversion layer is formed at a surface of the substrate regionimmediately below the control gate. Though memory gates are similarlydriven to the selected state, the inversion layer is selectively formedbelow the memory gate, dependent on the stored data. In one of thememory mats MMk and MMj, the control gate line CGL is driven to theselected state and in the other memory mat, the control gates are all atthe unselected state.

In synchronization with the driving of the control gate line to theselected state, the precharge end enable signal pcend attains to the Hlevel and, in response, the precharge signal pc in the selected state(any of pc <3:0>) attains to the H level, MOS transistors PG0-PG2 turnoff in the reference current supplying circuit VRF (VRF0-VRF3)corresponding to the selected common bit line, and the prechargeoperation is completed.

By establishing synchronization as much as possible between the timingsof driving the memory cell current and driving the reference current tothe subbit line, the potential difference in accordance with thereference current and the memory cell current is reliably transmitted tointernal read data lines (sense output lines) Ibk and Ibj. In FIG. 9,the rise of the main clock signal CKM is used as a reference and afterthe delay time of DL2, the subbit line is driven by the constantcurrent, thereafter, the control gate line is driven to the selectedstate, and after the delay time DL1 from the rise of the main clocksignal CKM, the precharge end enable signal pcend is activated to finishthe precharging operation. There is an overlapping period, ΔT, betweenthe precharging operation of the selected subbit line and driving of theselected control gate line CGL to the selected state. Thus, erroneousreading resulting from unstable memory cell current, which may occurwhen the control gate line CGL is at the state of intermediate voltagelevel, can be prevented.

In the subbit line connected to the selected memory cell, the voltagelevel changes at different speed dependent on the data stored in thememory cell. FIG. 9 shows both changes in potential of the subbit lineSBL in the cases of high threshold voltage and low threshold voltage.The subbit line SBL driven by the reference current is discharged by theMOS transistor NG1 serving as a constant current source, and therefore,the potential level thereof decreases gradually. The speed of change ofthe potential of reference subbit line SBL is intermediate between thespeeds of change of the potential to the H level and to the L level, ofthe selected subbit line SBL to which the selected memory cell isconnected.

Because of the change in potential of the selected subbit line and thereference subbit line, potential difference appears in the voltagelevels of sense output lines Ibk and Ibj connected to the senseamplifier circuit, and when the difference becomes about 10 mV, thesense amplifier activating signal SAE is activated, and the potentialdifference between the internal read data lines (sense output lines) Ibkand Ibj is differentially amplified.

In response to activation of the sense amplifier activating signal SAE,a subbit line discharge signal dc, the subbit line selection signals yra<7:0> and the common bit line selection signals yrb <3:0> areinactivated (Y decoder is inactivated). In response, sense amplifiercircuit SA is isolated from the common bit lines and subbit lines, theload thereon is alleviated, and high speed sensing operation isachieved. The sensing operation is performed on 64 bits of data (notconsidering parity bits), that is, data Ibj <63:0> and Ibk <63:0> inparallel, and 64 bits of data (71 bits of data including parity bits)are internally read in parallel.

After a prescribed time period from activation of the sense amplifieractivating signal SAE, the X decoder is inactivated provided that thesubbit line discharge signal dc is inactivated, the control gate signalscg <N:0> are inactivated, and the control gate lines are driven to theground voltage level. As the sense amplifier has been activated, thesubbit line SBL is isolated from the reference current supplyingcircuit, and thus, the subbit line SBL is discharged to the groundvoltage level (as will be described later, there is provided a subbitline discharging transistor).

Thereafter, of the reference current control signals VFDCjN and VFDCkN,one that corresponds to the selected memory mat is driven to theinactive state, and by the transistor NG1 serving as the constantcurrent source of the reference current supplying circuit, the commonbit line is discharged to the ground voltage level.

Thereafter, the sense amplifier activating signal SAE is inactivated,and thus one data reading cycle ends.

Further, as shown in FIG. 9, in response to activation of the senseamplifier activating signal SAE, the subbit lines are driven to theunselected state, that is, the Y decoder is inactivated and the controlgate line CGL is inactivated (X decoder is reset). Therefore, at thestart of the next reading cycle, what is required is simply to drive theY selection signal, that is, the subbit line selection signals yra <7:0>and the common bit line selection signals yrb <3:0> from the initialstate of H level to the L level, for the selected signal. Different fromthe static decoding operation, it is unnecessary to drive the subbitline selection signals and the common bit line selection signals fromthe H level to the L level and from the L level to the H level at highspeed. Therefore, the driving power of the Y decoder can be reduced(high-speed operation is required only for activation). Further, thesubbit line selection signals yra <7:0> and the common bit lineselection signals yrb <3:0> are not set to a multi-selection state(transition to the unselected state and transition to the selected statedo not overlap), and hence, can be driven to the definite and settledstate at a faster timing.

Further, as the control gate line is inactivated (X decoder is reset) inaccordance with the sense amplifier activating signal SAE, the end timeof the reading cycle can be made earlier, and hence, the start timing ofthe next reading cycle can be set faster.

Further, the predecoded address signal is latched by the address latchcircuit to generate the latched address signal LADD, and when theaddress latch circuit enters the latching state, the latched addresssignal LADD has already been settled, and therefore, the skew of thelatched address signal LADD can be reduced. Therefore, the decodingoperation can be performed at a faster timing in the address decodecircuit (X decoder and Y decoder) in accordance with the latched addresssignal (latched predecoded signal) LADD, so that the margin for thedecoding operation can be enlarged and the reading timing can be setfaster.

FIG. 10 schematically shows a state of a portion related to the senseamplifier at the time of precharging, in a data reading. As shown inFIG. 10, at the time of precharging, the reference current supplyingcircuit VRF supplies the power supply voltage VCC to subbit lines SBLkand SBLj through common bit lines CBLk and CBLj, and drives a constantcurrent by constant current source transistor NG1 (as the signals VFDCjNand VFDCkN are both at the L level). At this time, the common bit linesCBLj and CBLk are equalized (by MOS transistor PG0).

Thereafter, there is an overlap period between driving of the selectedcontrol gate line to the selected state and precharging operation of thesubbit line, and then, the memory cell data is read, from the subbitline currents, as shown in FIG. 11. Here, as an example, a memory cellMC is connected to subbit line SBLk, and the memory cell current Imcorresponding to the stored data is driven to the source line SL. Forsubbit line SBLj, the control gate line is in the unselected state, andfrom common bit line CBLj, the reference current iref is driven(discharged), by the constant current source transistor NG1 in thereference current supplying circuit VRF. The constant current sourcetransistor NG1 is isolated from the common bit line CBLk. When thepotential difference between the sense nodes (sense output lines Ibk andIbj) of the sense amplifier circuit SA increases because of thedifference between the memory cell current Im and the reference currentiref, the sense amplifier circuit SA is isolated from common bit linesCBLk and CBLj, to perform the sensing operation.

Therefore, in the unselected subbit line groups, even when the subbitline is coupled to the common bit line by the first selector, thecorresponding common bit line is simply discharged to the ground voltagelevel by the constant current source transistor of the reference currentsupplying circuit, and precharging operation is not performed (theprecharge signal pc is kept at the H level). Therefore, current is notconsumed in the unselected subbit line groups.

Particularly, as the decoder is reset after reading, the common bit lineselection signal can be set to the initial state at the start of thenext data read cycle, and the precharge signal can easily be generatedbased on the common bit line selection signal.

FIG. 12 shows an example of the construction of a circuit for generatingthe precharge signals pc <3:0>.

Referring to FIG. 12, the precharge signal generating portion includesan OR circuit 24 that receives the precharge end enable signal, pcend,and the common bit line selection signals yrb <3:0>. The OR circuit 24includes OR gates provided for respective bits of the common bit lineselection signal yrb <3:0>, and generates a precharge signal pc <3:0> of4 bits. Therefore, when the precharge end enable signal, pcend, and oneof the common bit line selection signals yrb <3:0> both attain to the Llevel, the corresponding one of precharge signals pc <3:0> attains tothe L level, and the precharge operation is executed for the selectedsubbit line.

In each memory mat, in accordance with the common bit line selectionsignals yrb <3:0> from the Y decoder and the main precharge end enablesignal, pcend, the corresponding one of precharge signals pc <3:0> isgenerated, and therefore, in each memory mat, the precharge signal canbe generated at high speed, alleviating the load on the prechargesignal.

In the above described construction, using the reference currentsupplying circuit VRF, the reference current for the memory cell isdriven. It is noted, however, that a dummy cell may be provided in thememory mat, and the reference current may be generated using such dummycell.

As described above, according to the third embodiment of the presentinvention, the address decode circuit is reset by the sense amplifieractivating signal SAE, so that internal reading circuitry can berecovered at high speed to the initial state. Therefore, the read cyclecan be made shorter, and high-speed data reading becomes possible.

Further, the direction of signal change in the next cycle is simply inthe direction to the activation state. Thus, it is unnecessary toperform both activation and inactivation of signals. Consequently,various selection signals and control signals can be reliably driven tothe active state at high speed.

Further, the precharge signal is generated based on the main prechargecontrol signal and the common bit line selection signals. Therefore,what is necessary is simply to generate the precharge signal in eachmemory mat. Thus, based on the common bit line selection signal in thereset state, the precharge signal can be generated accurately.

Fourth Embodiment

FIG. 13 schematically shows correspondence between an output of one Xdecoder (12 u or 12 l) and the control gate lines of memory mat MM, ofthe non-volatile semiconductor memory device according to the presentinvention. Memory mat MM corresponds to one memory mat (MM0U-MM3U (MMU)and MM0L-MM3L (L)) shown in FIG. 5 described previously.

Referring to FIG. 13, by the X decoder outputs, memory mat MM is dividedinto control gate blocks SCT0-SCT31 each including 32 control gate linesCGL. Each of the control gate blocks SCT0-SCT31 may form one sector, anderasure may be performed in units of sectors. Control gate blocksSCT0-SCT31 are designated by the predecoded block designating signals bs<0>-bs <31>, respectively. The predecoded block designating signals bs<0>-bs <31> are generated from the X decoder (12 u or 12 l) shown inFIG. 5. Therefore, it follows that 1024 control gate lines are arrangedon one memory mat. In a selected memory block (memory block MBA or MBBof FIG. 1), one control gate block is designated.

FIG. 14 shows a more detailed construction of the control gate blockshown in FIG. 13. As shown in FIG. 14, control gate block SCT (one ofSCT0-SCT31) is divided into control gate groups SSCT0-SSCT7 eachincluding four control gate lines CGL. The control gate groupsSSCT0-SSCT7 are specified by the predecoded signal bits xclka <0>-xclka<7>, respectively. The predecoded signal bits xclka <0>-xclka <7> areapplied from the address latch circuit shown in FIG. 5, namely, they arethe predecoded signal bits generated from predecoder 3 (3A or 3B) shownin FIG. 1. The control gate group SCCT includes four control gate linesCGL, and one control gate block includes 8 control gate groups, andtherefore, 32 control gate lines CGL are included in total in onecontrol gate block.

As will be described later, a memory mat corresponding to one senseamplifier band (sense amplifiers) includes 8 control gate blocks.Therefore, in a memory mat corresponding to one sense amplifier band,there are 256 control gate lines CGL. The control gate lines are sharedby memory cells aligned along the column direction (word line extendingdirection), in one memory block.

FIG. 15 shows a detailed construction of the control gate group shown inFIG. 14. Each control gate group SSCT (one of SSCT0-SSCT7) includes fourcontrol gate lines CGL0-CGL3. The control gate lines CGL0-CGL3 arespecified by the predecoded signal bits xclkb <0>-xclkb <3>,respectively. The predecoded signal bits xclkb <0>-xclkb <3> are alsothe predecoded signal bits applied from address latch circuit 4 shown inFIG. 5.

As shown in FIGS. 13 to 15, in the selected memory block, in accordancewith the combination of predecode block designating signal bits bs<0:3:1> and predecoded signal bits xclka <0:7> and xclkb <0:3>, onecontrol gate line CGL is driven to the selected state, in accordancewith the output signals from X decoder.

FIG. 16 schematically shows constructions of the address latch circuitand the decode circuit in accordance with the fourth embodiment of thepresent invention. FIG. 16 shows address latch circuit 4, X decoder 12and Y decoder 13 that are provided for one memory block (MB). X decoder12 corresponds to the construction shown in FIG. 5 that includes Xdecoders 12 u and 12 l.

Address latch circuit 4 includes a latch circuit 30 for latching an8-bit predecoded signal from the predecoder in accordance with a setdesignating signal SETAN and outputting an 8-bit latch predecoded signalltbsa; a latch circuit 31 for latching the predecoded signal from thepredecoder in accordance with a set designating signal SETBN andoutputting a 4-bit latch predecoded signal ltbsb; a latch circuit 32 forlatching the predecoded signal from the predecoder in accordance withthe set designating signal SETBN and outputting an 8-bit latchpredecoded signal XCLKA; a latch circuit 33 for latching the predecodedsignal of 4 bits from the predecoder in accordance with the latchdesignating signal SETBN and outputting a 4-bit latch predecoded signalXCLKB; and a block decode circuit 34 for decoding the latch predecodedsignals ltbsa and ltbsb and driving a control gate block designatingsignal BS of 32 bits.

The set designating signals SETAN and SETBN are activated when thecorresponding memory block is selected, and latch the predecoded signalapplied from the predecoder. The set designating signals SETAN and SETBNare generated, therefore, based on the address latch timing signal andthe block address signal predecoded by the predecoder.

The latch predecoded signals XCLKA and XCLKB correspond to thepredecoded signal bits xclka <0:7> and—xclkb <0:3>, respectively. Blockdecode circuit 34 is formed of an AND type decode circuit, andgenerates, from the 8-bit latch predecoded signal ltbsa and the 4-bitlatch predecoded signal ltbsb, the control gate block signal BS (controlgate block designating signals bs <0:31>) that designates one controlgate block among 32 control gate blocks.

To latch circuits 30-33, X address reset signal XRST is applied. Whenthe reset signal XRST is active (H level), the contents held by thelatch circuits 30-33 are reset to the initial state (unselected state).

In latch circuits 30-33, when in a set state, a corresponding one of thepredecoded signal bits is set to the active state when selected inaccordance with the output signal from the predecoder, and the remainingbits are kept at the unselected state.

X decoder 12 (X decoder 12 u and 12 l of FIG. 5) includes: a controlgate power supply circuit 40; an X unit decode circuit XDEC receiving 1bit from each of the control gate block designating signals bs <0:31>and the predecode signals xclka <0:7> and xclkb <0:3>; and a controlgate drive circuit CDV provided corresponding to each unit decodecircuit XDEC, receiving the power supply from control gate power supplycircuit 40 as an operational power supply voltage, and driving thecorresponding control gate line CGL in accordance with an output signalfrom the corresponding X unit decode circuit XDEC.

The X unit decode circuit XDEC and the control gate drive circuit CDVare arranged for the control gate line CGL provided in the correspondingmemory block.

The control gate block designating signal BS designates one of 32control gate blocks, and by the predecoded signals xclka and xclkb, onecontrol gate group and a control gate are designated. Therefore, in Xdecoder 12, 32×32=1024 X unit decode circuits are provided, and one of1024 control gate lines CGL is driven to the selected state.

Control gate power supply circuit 40 includes: an N channel MOStransistor 40 c for transmitting a control gate voltage Vcg to a powersupply node 41 in accordance with a test mode designating signal TEST1;an inverter 40 a receiving a data read mode designating signal MDSA; a Pchannel MOS transistor 40 b for transmitting the control gate voltageVcg to power supply node 41 in accordance with an output signal frominverter 40 a; an inverter 40 d receiving a test mode designating signalTEST2; and a P channel MOS transistor 40 e for transmitting a testvoltage VF to power supply node 41 in accordance with an output signalfrom inverter 40 d.

In the read mode, in accordance with the data read mode designatingsignal MDSA, the control gate voltage Vcg is supplied to the controlgate line drive circuit CDV through P channel MOS transistor 40 b. Inthe test mode, in accordance with the test mode designating signalTEST1, a voltage of Vcg—Vth is transmitted to the control gate linedrive circuit CDV. Here, Vth represents threshold voltage of MOStransistor 40 c. When the test mode designating signal TEST1 isactivated, the read mode designating signal MDSA is at the inactivestate of L level, and internal data reading is stopped (column selectingoperation is stopped).

When the test mode designating signal TEST2 is activated, the testvoltage VF is supplied as an operational power supply voltage to controlgate drive circuit CDV. By changing the voltage VF, the margin for thecontrol gate voltage, for example, in the write mode is measured.

Y decoder 13 includes: a latch circuit 42 for latching a 4-bitpredecoded signal from the predecoder in response to activation of a setdesignating signal YRSETN; an inversion buffer circuit YBFB forgenerating, when activated, a 4-bit Y selection signal (common bit lineselection signal) YRBN (yrb <0:3>) in accordance with a latch predecodedsignal outputted from latch circuit 42; a latch circuit 43 for latchingthe predecoded signal from the predecoder in response to activation ofthe set designating signal YRSETN; an inversion buffer circuit YBFA foroutputting, when activated, a Y selection signal (subbit line selectionsignal) YRAN (yra <0:7>) in accordance with a latch predecoded signalfrom latch circuit 43; a delay portion 44 for generating a Y relatedcontrol signal controlling various operations related to columnselection (Y related circuitry operation) in accordance with transitionof the output signal from latch circuit 43; a buffer circuit 45 foroutputting a sense amplifier activating signal SAE in accordance with anoutput signal CKSAEF of delay portion 44 and the read mode designatingsignal MDSA; an NOR gate 46 receiving the output signal CKSAEF of delayportion 44 and the test mode designating signal MTEST; an inverter 48receiving an output signal of NOR gate 46; and a buffer circuit 50receiving an output signal of NOR gate 46 and the read mode designatingsignal MDSA and outputting an X address reset signal XRST.

Inversion buffer circuits YBFA and YBFB are both activated when theoutput signal from inverter 48 is at the H level and the read modedesignating signal MDSA is at the active state of H level, invert thelatch predecoded signal from corresponding latch circuits 43 and 42, andoutput the Y selection signals YRAN and YRBN.

The test mode designating signal MTEST is set to the H level when thetest mode is designated in the non-volatile semiconductor memory device,the output signal of NOR gate 46 is fixed to the L level and, inresponse, the X address reset signal XRST is fixed to the L level.

Y decoder 13 further includes an AND circuit 47 receiving an outputsignal of NOR gate 46 and the read mode designating signal MDSA andoutputting a reset signal YRRST. When the output signal YRRST of ANDcircuit 47 attains to the H level, latch circuits 42 and 43 are reset.Accordingly, when the test mode designating signal MTEST is at theactive state, the reset signal YRRST for the latch circuits 42 and 43are fixed to the L level. Therefore, in a test operation, when onecontrol gate line is to be continuously kept at the selected state, orwhen switching of memory cell selection/unselection is to be performedin synchronization with the clock signal, activation of the resetsignals XRST and YRRST in response to activation of the sense amplifieris inhibited.

FIG. 17 shows a specific construction of a portion of four X unit decodecircuits of the X decoder shown in FIG. 16. Referring to FIG. 17, the Xdecode circuit (four X unit decode circuits) includes: P channel MOStransistors PQA0-PQA3 connected to output nodes ND0-ND3, respectively,and commonly receiving, at their gates, a predecode signal xclka <m>; Pchannel MOS transistors PQB0-PQB3 connected to output nodes ND0-ND3,respectively, and receiving, at their gates, the predecode signals xclkb<0>-xclkb <3>, respectively; N channel MOS transistors NQB0-NQB3connected to output nodes ND0-ND3, respectively, and receiving, at theirrespective gates, the predecode signals xclkb <0>-xclkb <3>; an Nchannel MOS transistor NQA connected commonly to MOS transistorsNQB0-NQB—and receiving, at its gate, the predecode signal xclka <m>; anN channel MOS transistor NQC coupled to MOS transistor NQA and to aground node, and receiving, at its gate, a predecoded block designatingsignal bs for selecting a control gate block; P channel MOS transistorsPP0-PP3 provided for output nodes ND0-ND3, respectively, and commonlyreceiving, at their gates, the predecoded block designating signal bsfor selecting a control gate block; and inverter drivers IV0-IV3provided for output nodes ND0-ND3, respectively.

In accordance with the output signals xe <0>-xe <3> of inverter driversIV0-IV3, control gate lines CGL0-CGL3 are driven to the selected orunselected state.

MOS transistor NQC is provided commonly to 32 X unit decode circuitsreceiving the predecode block designating signal bs. MOS transistor NQAis provided commonly to 8 unit X decode circuits arranged correspondingto 8 control gate lines included in the control gate block.

When the predecoded block designating signal bs for designating acontrol gate block is in the unselected state, the output nodes ND0-ND3are precharged and maintained at the power supply voltage level by MOStransistors PP0-PP3. Further, as the MOS transistor NQC is off and thedischarge path of output nodes ND0-ND3 is shut off, the output signalsxe <0>-xe <3> of inverter drivers IV0-IV3 all attain to the L level.Therefore, when the control gate block shown in FIG. 13 is in theunselected state, the control gate driving signals for 32 control gatelines CGL included therein are all kept at the inactive state of Llevel.

When the predecoded block designating signal bs attains to the selectedstate of H level, MOS transistor NQC turns on and MOS transistorsPP0-PP3 are kept off.

When the predecoded signal bit xclka <m> is at the L level, MOStransistor NQA turns off and MOS transistors PQA0-PQA3 turn on, outputnodes ND0-ND3 are kept at the power supply voltage level, andcorresponding control gate lines CGL0-CGL3 are set to the unselectedstate. Therefore, even when control gate block SCT (any of SCT0-SCT31)shown in FIG. 13 is selected, the corresponding control gate linesCGL0-CGL3 are kept unselected, as long as the control gate group SSCT(any of SSCT0-SSCT7) shown in FIG. 14 is in the unselected state.

When the predecoded block designating signal bs and the predecodedsignal bit xclka <m> are set to the selected state, MOS transistors NQCand NQA turn on and MOS transistors PQA0-PQA3 and PP0-PP3 are all keptoff. In this case, one of the predecoded signal bits xclakb <0>-xclkb<3> attains to the selected state of H level, and a corresponding one ofoutput nodes ND0-ND3 is driven to the ground voltage level. In response,the corresponding one of the output xes <0>-xe <3> of inverter driversIV0-IV3 is driven to the H level, and one of the four control gate linesof the corresponding control gate group SSCT is driven to the selectedstate.

As shown in FIG. 17, in the X decoder, MOS transistor NQC selecting acontrol gate block is arranged common to 32 X unit decode circuitsprovided for the control gate block, and MOS transistor NQA is arrangedcommon to 8 X unit decode circuits included in the control gate group,whereby the number of elements forming the X decoder circuit can bereduced and power consumption can be reduced. Further, load on thepredecoded signals bs and xclkb <m> can be alleviated (associated gatecapacitance is small), and therefore, decoding operation can beperformed at high speed in accordance with the predecoded signal.

FIG. 18 is a timing diagram representing operations of address latchcircuit 4, X decoder 12 and Y decoder 13 shown in FIG. 16. Theoperations of the circuits shown in FIG. 16 will be described withreference to FIG. 18.

In response to a rise of the clock signal CKM (CLK), the internaladdress signal IADD is output from the address input circuit. When acommand (write enable signal) designates a data read mode before therise of clock signal CLM, the read mode designating signal MDSA attainsto the H level.

When the internal address signal IADD is predecoded by a predecoder, thelatch designating signals SETAN and SETBN as well as YRFSTN for theselected memory block (MBA or MBB) attain to the active state of Llevel. In response, latch circuits 30-33 and 42 and 43 attain to thelatching state, latching the predecoded signal applied from thepredecoder.

In address latch circuit 4, by X address decode circuit 34, thepredecoded block selection signal BS (bs <0:31>) is output, and thelatch predecoded signals btbsb, XCLKA and XCLKB output from latchcircuits 31-33 attain to the definite state. These predecode signals areat the H level in the selected state (sel) and L level in the unselectedstate (usel).

In Y decoder 13, as the signal MDSA and the output signal of inverter 48are at the H level, inversion buffer circuits YBFA and YBFB buffer(invert the logic of) the output signals from latch circuits 43 and 42,and output the Y selection signals YRAN and YRBN. The subbit lineselection signal YRAN (yra <0:7>) and the common bit line selectionsignal YRBN (yrb <0:3>) are at the L level in the selected state and atthe H level in the unselected state. In accordance with the bufferedpredecoded signals YRAN and YRBN, a subbit line is selected and coupledto a corresponding sense amplifier. Further, in accordance with thesesignals BS, XCLKA and XCLKB, a control gate line CGL is driven to theselected state.

In accordance with the change in the output signal of latch circuit 43,delay portion 44 successively activates/inactivates the Y relatedcontrol signals, charging/discharging the sub bit line. Then, when thesignal CKSAEF from delay portion 44 is activated, the sense amplifieractivating signal SAE from buffer circuit 45 is driven to the activestate, and a sensing operation is performed. When the output signalCKSAEF of delay portion 44 attains to the H level, the output signal ofNOR gate 46 attains to the H level. As the read mode designating signalMDSA is at the H level, the output signal YRRST of buffer circuit 47attains to the H level, latch circuits 42 and 43 are reset, the latchpredecoded signals are returned to the initial state of unselectedstate, and accordingly, the signals YRAN and YRBN are also driven to theunselected state.

Further, in accordance with an output signal from NOR gate 46, the Xaddress reset signal XRST from buffer circuit 50 attains to the H level,latch circuits 30-33 are reset, and the latched predecoded signals arereturned to the initial state. In accordance with the activation of theX address reset signal XRST, the signals BS, XCLKA and XCLKB are set tothe unselected state, and in response, control gate line CGL is drivento the unselected state.

When the output signal CKSAEF of delay portion 44 is driven to theinactive state as Y decoder 13 is reset, the sense amplifier activatingsignal SAE is inactivated in response, and the reset signals YRRST andXRST are both inactivated.

In this data reading, after activation of the sense amplifier, thepredecoded signals latched by latch circuits 30-33, 42 and 43 are reset,and therefore, the time Tsm until the next read cycle can be madelonger, the data reading process of the next cycle can be started at afaster timing, and high-speed reading becomes possible.

Further, not only the latch circuits but also the Y selection signalsYRAN and YRBN are reset. Therefore, even in such a situation that onlyresetting of the predecoded signals of latch circuits would cause anydelay of resetting operation because of gate propagation delay in decodecircuits and others of the succeeding stage, the output signal of the Ydecoder can be reset quickly, and similarly, at the start of the nextcycle, the internal state can reliably be returned to the initial state(inactive state).

In the construction described above, the reset signal is not applied tothe X unit decoder circuit XDEC driving the control gate line CGL. The Xaddress reset signal XRST may be applied also to the unit X decoderXDEC. In this case also, the timing of inactivating control gate lineCGL can be made faster and therefore, the reading operation can surelybe started earlier in the next cycle.

FIG. 19 is a signal waveform diagram representing an operation in thecase when the test mode designating signal MTEST shown in FIG. 16 is setto the H level. When the test mode designating signal MTEST is set tothe H level, the output signal of NOR gate 46 shown in FIG. 16 is fixedat the L level, and in response, the output signals of AND circuits 47and 50 are fixed to the L level. The output signal of inverter 48 iskept at the H level.

As shown in FIG. 19, in accordance with the internal address signalLADD, the predecoded signals XCLKA and XCLKB change, and the predecodedblock designating signal BS (bs) for designating a control gate blockalso changes in accordance with the latched internal address signal.After the control gate CGL is driven to the selected state (sel), thereset control signal CKSAEF is driven to the active state by delayportion 44, and thereafter, the sense amplifier activating signal SAE isactivated. After a prescribed time period, the reset signal CKSAEF fromdelay portion 44 attains to the L level and the sense amplifieractivating signal SAE is inactivated.

Even when the reset control signal CKSAEF is generated (activated) fromdelay portion 44, the reset signals XRST and YRRST are fixed at the Llevel, and therefore, the states of selected control gate line CGL andselected subbit line do not change.

In the next cycle, when the internal address signal IADD changes, again,the control gate block designating signal BS (bs) and the predecodesignals XCLKA, XCLKB, YRAN and YRBN change in accordance with the newinternal address signal. In accordance with such signal changes, thecontrol gate line CGL is changed, and the selected subbit line ischanged.

Therefore, when the test mode designating signal MTEST is set to the Hlevel, the control gate line and the subbit line selection signal areswitched in accordance with the internal address signal latched inaccordance with the clock signal CKM (CLK). Therefore, it becomespossible to test the margin for the internal operation for the cycletime of main clock signal CKM.

When the internal address signal is latched and then, the clock signalCLM (CLK) is kept at the L level, the internal state is kept unchanged,and therefore, a control gate line CGL can be continuously maintained atthe selected state, and therefore, a voltage stress acceleration test,for example, can be performed.

Thus, when the activation of reset signals YRST and XRST is inhibitedusing the test mode designating signal MTEST, it is possible to inhibitresetting of the control gate line selection signal and the subbit lineselection signal in one read cycle. The test mode designating signalMTEST is generated from an internal control circuit such as a sequencecontroller (CPU), not shown, in accordance with an external command.Specific functions of the test mode designating signal MTEST will bedescribed in detail later. Here, it is described simply as a signal forsetting the test mode.

As described above, according to the fourth embodiment, the addresslatch circuit and the Y decode circuit are configured to be resetinternally in the data read cycle, so that the internal state can bereturned to the initial state with sufficient margin with respect to thenext read cycle, and therefore, the next read cycle can be started at afaster timing.

Further, by inhibiting the reset operation in the test mode, the controlgate line and the subbit line can be selected in a static manner, inaccordance with an address signal applied in synchronization with theclock signal.

Fifth Embodiment

FIG. 20 schematically shows a construction of a data reading portionaccording to the fifth embodiment of the present invention. Referring toFIG. 20, corresponding to memory blocks (A and MBB), sense amplifierbands SKA and SKB are arranged, respectively. The sense amplifier bandsSKA and SKB each include sense amplifiers SK0-SB3 shown in FIG. 5. Aswill be described in detail later, one memory block is divided into fourtrains of memory mats, and two trains of sense amplifiers are arranged.Here, the propagation time of internal read data will be discussed, andtherefore, a construction in which a sense amplifier band is arrangedfor each memory block is shown as a representative example.

A read main bit line group RMBL is arranged common to sense amplifierbands SKA and SKB, and the data amplified by sense amplifier circuits insense amplifier band SKA or SKB are transmitted through main bit linegroup RMBL to output latch circuit 6. By way of example, the read mainbit line group RMBL includes, for transmitting 64-bit data and 7-bit ECCcode in parallel, read main bit lines rmbl <0>-rmbl <70> of 71 bits.

Sense amplifier bands SKA and SKB have their subbit lineprecharge/equalize and sensing operations controlled in accordance witha precharge end enable signal, pcend, and the sense amplifier activatingsignal SAE applied from sense amplifier control circuits 60A and 60B,respectively. Sense amplifier control circuits 60A and 60B also generatea monitor signal MSAE in synchronization with the sense amplifieractivating signal SAE and transmit the monitor signal MSAE to outputcontrol circuit 7, through a monitor signal line 62. Monitor signal line62 has the same load as read main bit line RMBL, and the monitor signalMSAE reflects the state of propagation of the internal read data tooutput latch circuit 6.

In accordance with the monitor signal MSAE, output control circuit 7outputs an output reset signal QRST including a buffer reset signal,rstqbn, and a main bit line precharge designating signal, mblpcn, forresetting output latch circuit 6. Consequently, even if the propagationtime of internal read data varies dependent on the position of theselected memory cell (dependent on the position of the activated senseamplifier band), the operation of output latch circuit 6 can becontrolled accurately in accordance with the state of propagation of theinternal read data.

FIG. 21 schematically shows an operation of the internal data readingportion shown in FIG. 20. In the following, an operation of the internaldata reading portion shown in FIG. 20 will be described with referenceto FIG. 21.

Sense amplifier control circuit 60A or 60B activates the sense amplifieractivating signal SAE, to activate the sense amplifier circuit of thecorresponding sense amplifier band SKA or SKB. In the activated senseamplifier band SKA or SKB, the sense amplifier circuits perform asensing operation, amplifying the data read from the memory cells. Basedon the amplified data, the read main bit line group RMBL is driven, sothat its potential changes. To the read main bit line group RMBL,differential signals reflecting the outputs of the sense amplifiercircuits are transmitted, as will be described later.

In synchronization with activation of the sense amplifier activatingsignal SAE, the monitor signal MSAE is generated (activated) from senseamplifier control circuit 60A or 60B and outputted to monitor signalline 62. After a prescribed time period from activation of thetransmitted monitor signal MSAE, output control circuit 7 activates thereset signal QRST, and the latch data of output latch circuit 6 isreset.

The monitor signal line 62 has the same signal propagation time as thedata propagation time of sense output line (Ibk, Ibj) as the internalread data transmission line and of the read main bit line group RMBL.The monitor signal MSAE and the sense amplifier activating signal SAEare output from the same circuit. Therefore, the monitor signal MSAE andthe internal read data sensed and amplified by the sense amplifiercircuit and transmitted on read main bit line group RMBL havesubstantially the same flight time. Therefore, output control circuit 7can accurately monitor the state of propagation of the internal readdata, using the monitor signal MSAE. By controlling the operation ofoutput latch circuit 6 based on the monitor signal MSAE, it becomespossible to drive the output latch circuit 6 to the reset stateaccurately, after the read data is latched in output latch circuit 6 andthe internal data is transferred to the ECC circuit.

Specifically, dependent on the position of the selected memory block,propagation time of the internal read data to output latch circuit 6varies. Therefore, if the circuit were reset at a faster timing, theinternal read data would be reset and inverted before it reaches andlatched by output latch circuit 6. However, by using the monitor signalMSAE, the margin for the reset timing of each data transfer can beensured, and thus, undesired inversion of the read data caused byresetting of the output latch circuit 6 during data reading can beprevented.

More specifically, the distance between output latch circuit 6 and senseamplifier band SKA or SKB is different, and therefore, the timenecessary for the read data from the selected memory block (or senseamplifier column) to reach the output latch circuit 6 is different. Whenresetting of output latch circuit 6 is controlled by using the monitorsignal MSAE, the data holding time can be made constant, regardless ofthe position of the selected memory block, in output latch circuit 6.

By the resetting operation in accordance with the state of internal datareading of output latch circuit 6, the data holding period of time andthe margin for the reset timing of output latch circuit 6 can be madeconstant, regardless of the position of the selected memory block,whereby accurate data reading becomes possible. Further, by theresetting of the read main bit line and output latch circuit 6, theinternal state can be returned to the initial state at a fast timing forthe next read cycle, to be ready for the next reading operation.

FIG. 22 specifically shows a construction of a portion related to 1 bitdata reading of the internal data reading portion shown in FIG. 20. Insense amplifier band SKA, there are provided a sense amplifier SAA and aread buffer 70A driving read main bit lines rmblk and rmblj inaccordance with output signal lines (sense output lines) Ibj and Ibk ofthe sense amplifier SAA.

In sense amplifier band SKB, there are provided a sense amplifier SAB,and a read buffer 70B driving read main bit lines rmblk and rmblj inaccordance with an output signal from sense amplifier SAB. Read main bitlines rmblk and rmblj form the read main bit line rmbl <m>, and transmitcomplementary data.

Output latch circuit 6 includes an output latch 72 latching the internalread data on read main bit line rmbl <m>, and output buffer 74generating a single end internal output data q <m> from output latch 72.

The reset signal QRST includes a read main bit line precharge signalmblpc applied to output latch 72, and a buffer reset signal rstqdbnapplied to output buffer 74.

Read buffers 70A and 70B have the same construction, and therefore, onlythe specific construction of read buffer 70A is shown in FIG. 22.

Read buffer 70A includes: gate circuits 70 a and 70 b buffering andtransmitting signals transmitted from sense amplifier SAA to senseoutput lines (internal data read line) Ibj and Ibk when an invertedsignal, saeba, of sense amplifier activating signal, saea, is activated(L level); p channel MOS transistors 70 c and 70 f rendered conductivein response to activation of the sense amplifier activating signalsaeba; a p channel MOS transistor 70 d rendered conductive when anoutput signal from gate circuit 70 a is at the L level, for coupling Pchannel MOS transistor 70 c to the read main bit line rmblk; an Nchannel MOS transistor 70 e rendered conductive when an output signalfrom gate circuit 70 a is at the H level, for coupling the read main bitline rmblk to the ground voltage VSS; a p channel MOS transistor 70 grendered conductive when an output signal from gate circuit 70 b is atthe L level, for coupling MOS transistor 70 f to the read main bit linermblj; and an n channel MOS transistor 70 h rendered conductive when anoutput signal of gate circuit 70 b is at the H level for coupling theread main bit line rmblj to the ground voltage VSS.

Gate circuits 70 a and 70 b output a signal of L level, when the senseamplifier activating signal saeba is inactive (H level). At this time,MOS transistors 70 d and 70 g are on, while MOS transistors 70 c and 70f are off, so that read buffer 70A is at an output high impedance state.

When the sense amplifier activating signal saeba is activated (attainsto the L level), MOS transistors 70 c and 70 f turn on, MOS transistors70 d and 70 e form a CMOS inverter, and MOS transistors 70 g and 70 hform another CMOS inverter. Gate circuits 70 a and 70 b operate as abuffer circuit, and respectively output the buffered signals of thesignals transmitted from sense amplifier SAA to sense output lines Ibjand Ibk.

By MOS transistors 70 d and 70 e, the output signal of gate circuit 70 ais inverted and transmitted to read main bit line rmblk, and by MOStransistors 70 g and 70 h, the output signal of gate circuit 70 b isinverted and transmitted to read main bit line rmblj.

In the sensing operation of sense amplifier band SKA, the senseamplifier activating signal saebb for sense amplifier band SKB isinactive, and read buffer 70B is at the output high impedance state.Therefore, the output data of read buffer 70A is transmitted over readmain bit line rmbl <m> to output latch 72.

On the contrary, when sense amplifier band SKB is in operation, senseamplifier band SKA is inactive, and read buffer 70A is kept at theoutput high impedance state.

FIG. 23 schematically shows the constructions of sense amplifier controlcircuits 60A and 60B shown in FIG. 20. The sense amplifier controlcircuits 60A and 60B have the same construction, and sense amplifiercontrol circuit 60 is shown representative of the circuits 60A and 60B.Referring to FIG. 23, sense amplifier control circuit 60 includes: aprecharge/sense control signal generating circuit 80 receiving at aninput node in a read designating signal, ltyrel, and generating a subbitline precharge control signal, fckdlpcend, and a sense amplifieractivation control signal, fckdlsae; a buffer circuit 81 buffering theoutput signal, fckdlpcend, of precharge/sense control signal generatingcircuit 80 and generating a subbit line precharge end control signal,ckdlpcend; a buffer circuit 82 buffering the output signal, fckdlsae, ofprecharge/sense control signal generating circuit 80 and generating asense activation control signal, ckdlsea; an inverter 83 inverting theoutput signal, fckdlsae, of precharge/sense control signal generatingcircuit 80 and generating a monitor sense activation signal, msaen; andan inverter 84 inverting the output signal, msaen, of inverter 83 forgenerating the decoder reset signal, declrsel.

The sense amplifier control signal, ckdlsae, from buffer circuit 82corresponds to the activation control signal CKSAEF shown in FIG. 16above, and based on this signal, the address latch circuit is reset. Thesignal, declrsel, is for resetting a decoder, which is applied to Xdecoder 12 shown in FIG. 16. The decoder reset signal, declrsel,corresponds to the output signal of inverter 48 shown in FIG. 16, whichmay reset the decode circuits YBFA and YBFB in Y decoder 13. In anycase, after activation of the signal, ckdldlsae, controlling activationof the sense amplifier, the decoder reset signal, declrsel, isgenerated, and the address latch circuit and the decoder are reset. Theinternal construction of precharge/sense control signal generatingcircuit 80 will be described in greater detail later. The signal,ltyrel, applied to input node, in, indicates transition of the Ypredecode address signal from the address latch circuit, which isactivated in the read mode and indicates that operation of the Y systemcircuit has started.

The voltages, dlypmg and dlynmj, are reference voltages setting theamount of driving current in a current limited type delay circuitincluded in precharge/sense control signal generating circuit 80. Thetest signal, tesdbsa, is a timing test designating signal for changingthe timing of activating the sense amplifier, and the signals, tesdrsa<0:1>, are test sense amplifier activation timing setting signals forsetting the timing for activating the sense amplifier.

The signal, tesdbpc, is for designating a mode for testing a prechargeend timing of a subbit line, and the signals, tesdbpc <0:1>, are forsetting the subbit line precharge end timing.

The signals, tesdbdm <0:1>, are test control signals for adjustingmagnitude of load capacitance of the output of the delay circuitincluded in precharge/sense control signal generating circuit 80.

Sense amplifier control circuit 60 further includes: an inverter 85receiving a Y address latch designating signal, caddlt; a delay circuit86 delaying an output signal of inverter 85 by a prescribed time period;cascaded inverters 87 and 88 of two stages, receiving an output signalof delay circuit 86; and an NAND gate 89 receiving an output signal frominverter 88 and the Y address latch designating signal, caddlt.

Based on the Y address latch designating signal, caddlt, the set signalsSETAN, SETBN and YRSETN for the latch circuit shown in FIG. 16 aregenerated. Inverters 85, 87 and 88, delay circuit 86 and NAND gate 89form in combination an inversion rise delay circuit to generate a oneshot pulse signal, which in turn falls to the L level after elapse ofthe delay time of inverters 85, 87 and 88 and of delay circuit 86, fromthe rise of Y address latch designating signal, caddlt.

Sense amplifier control circuit 60 further includes: a reference currentdischarge timing decode circuit 90 for decoding reference currentdischarging test signals, tesdbreft <0:1>; an inverter 91 receiving thetest mode designating signal MTEST; an NAND gate 92 receiving the outputsignals from inverters 88 and 91; an NOR gate 93 receiving an outputsignal of NAND gate 92 and an output signal of inverter 85; delaycircuits 94 and 95 delaying, by respective prescribed time periods, theoutput signal of NOR gate 93; a delay circuit 96 delaying an outputsignal, clkdlpcendn, of precharge/sense control signal generatingcircuit 80 by a prescribed time period; an NAND gate 97 receiving anoutput signal of delay circuit 96 and an output signal of inverter 91;an NOR gate 98 receiving an output signal of NAND gate 97 and an outputsignal, clkdlpcendn, of precharge/sense control signal generatingcircuit 80; tristate inverters 99-102 selectively inverting and passingan output signal of NOR gate 93, the output signals of delay circuits 94and 95 and an output signal of NOR gate 98, in accordance with an outputsignal of reference current discharge timing decoder 90; an inverter 103receiving an output signal, fckdlsea, of precharge/sense control signalgenerating circuit 80; a set/reset flip-flop 104 set in accordance withan output signal of inverter 103 and reset in response to activation ofthe subbit line discharge timing signal, restbffn, or the output signalof NAND gate 89; a buffer circuit 105 for buffering a complementaryoutput signal of set/reset flip-flop 104 and generating the subbit linedischarge control signal, ckdldcn; a set/reset flip-flop 106 set inresponse to an output signal of any of tristate inverters 99-102 andreset in response to activation of an output signal of inverter 103 orthe subbit line discharge timing signal, restbffn; and a buffer circuit107 buffering an output signal of set/reset flip-flop 106 and generatingthe reference current discharge control signal, ckdlrefdc.

Flip-flops 104 and 106 each have a set input S and a reset input R, andset or reset when an L level signal is applied to the set input S or thereset input R.

Reference current discharge timing decode circuit 90 includes: aninverter IG1 receiving the power supply voltage, vdd; inverters IG2 andIG3 receiving test bits, tesdbreft <1> and tesdbreft <0>, respectively;an NOR gate NG1 receiving output signals of inverters IG1-IG3; an NORgate NG2 receiving output signals of inverters IG1 and IG2 and test bit,tesdbreft <0>; an NOR gate NG3 receiving output signals of inverters IG1and IG2 and test bit, tesdbreft <0>; and an NOR gate NG4 receiving anoutput signal of inverter IG1 and test bits, tesdbreft <1> and tesdbreft<0>.

Each of the NOR gates NG1-NG4 outputs a signal at the H level when thesignals applied to the inputs thereof are all at the L level. Therefore,in accordance with the states of test bits, tsedbreft <0:1>, an outputsignal of any one of the NOR gates NG1-NG4 attains to the H level. Theoutput signals of NOR gates NG1-NG4 are applied to control nodes oftristate inverter buffers 102-99, respectively, and in accordance withthe output signals of NOR gates NG1-NG4, the output signals of tristateinverters 99-102 are activated. Thus, the delay time of the signalapplied to the set input of set/reset flip-flop 106 can be adjusted.

Specifically, by setting test bits, tesdbreft <0:1>, to appropriatelogic levels, the timing of activating the reference current dischargecontrol signal, ckdlrefdc, which is a basic signal for the referencecurrent control signals VFDCkN and VFDCjN shown in FIG. 8, can beadjusted and, in response, the timing of discharging the referencecurrent, iref, can be adjusted.

FIG. 24 schematically shows a construction of a portion generating inputsignals (Y related control signals) to sense amplifier control circuit60 shown in FIG. 23. Referring to FIG. 24, the Y related control signalgenerating portion includes: a test mode control circuit 101 taking anexternal command and an address AD in synchronization with the clocksignal CKM (or CLK) and generating various test mode designating signalssuch as tesdpc and tesdsa; a read activation control circuit 112 takingan external command CMD in synchronization with the clock signal CKM andgenerating the reset signals, restbffn, restbcn, and the Y address latchdesignating signal, caddlt; an address latch control circuit 114generating address latch designating signals SETAN, SETDN and YRSETN inaccordance with a predecoded signal, ypr16, specifying a train of memorymats from a predecoder, not shown, and in accordance with the Y addresslatch designating signal, caddlt, from read activation control circuit112; a latch circuit 43 latching a predecode signal, ypra, in accordancewith the Y address latch designating signal YRSETN from address latchcontrol circuit 114 and generating a Y address change detecting signal(read operation start designating signal), ltrel, in accordance with achange in the latch predecoded signal; a selected mat detecting circuit116 generating the selected mat designating signals, selbootk andselbootj, in accordance with the predecoded signal, ypr16; and a Yrelated operation start detecting circuit 118 generating an operationstart timing detecting signal, yab16, for the Y related circuitry, inaccordance with the predecoded signal, ypr16.

The Y related circuitry includes the Y decoder, the sense amplifiercircuit, the reference current supplying circuit, and circuits relatedto column selection and internal data reading such as the output latchcircuit.

The predecoded signal ypr16 is a 2 bit signal (in case where one memoryblock includes two memory mat trains) that specifies which of the memoryblocks MBA and MBB shown in FIG. 1 is designated, and designates fromwhich of the upper and lower trains of memory mats in the selectedmemory block, the memory cell data should be read.

Latch circuit 43 is the same as latch circuit 43 FIG. 16, which sets thepredecoded signal in accordance with the set signal YRSETN, andgenerates the subbit line selection signals, yra <0:7>, and further, bydetecting the change in these signals, generates a read operation startdesignating signal ltrel.

The selected mat detecting circuit 116 generates the signals, selbootkand selbootj, that designate which of the upper and lower memory mattrains is selected, in accordance with the predecode signal ypr16. Aswill be described in detail later, the signals, selbootk and selbootj,control inversion/non-inversion of a selected single end signal when asingle end signal is to be generated from complementary signals in anoutput buffer included in the output latch circuit.

Y related operation start detecting circuit 118 detects the change inpredecoded signal ypr16, and generates the Y related operation starttiming signal yab16.

The selected mat detecting circuit 116 and Y related operation startdetecting circuit 118 are included in delay portion 44 shown in FIG. 16.The signal, ltrel, may also be generated by the address change(transition) detecting circuit at delay portion 44 shown in FIG. 16.

Read activation control circuit 112 sets the reset signals, restbffn andrestcn, to the active state of L level in response to the rise of theclock signal CKM, when the command CMD instructs data reading (when thewrite enable signal AWE is at the H level), and after resetting,generates the Y address latch designating signal, caddlt.

FIG. 25 is a timing diagram representing an operation of the circuitryshown in FIG. 24 in the read mode. In the following, the operation ofthe Y related control signal generating portion shown in FIG. 24 in anormal read operation mode will be described with reference to FIG. 25.

In a normal operation mode, when a write enable signal /WE, being thecommand CMD, for example, is set to the H level, the data read mode isdesignated. In response to the rise of the clock signal CKM, readactivation control circuit 112 sets and maintains the reset signals,restbcn and restbffn, at the L level for a prescribed time period. Inaccordance with activation of these reset signals, restbcn and restbffn,internal signal lines (data bus and subbit line) are reset to theinitial state. Here, as described in the first embodiment above, at aprescribed timing after activation of the sense amplifier activatingsignal SAE (sae), the internal state is reset, and in accordance withthe reset signals, restbdcn and restbffn, the internal state is reliablyset to the initial state at the start of each read cycle.

When these reset signals, restbcn and restbffn, are inactivated, the Yaddress latch designating signal caddlt is set to and kept at the Hlevel for a prescribed time period.

In response to the rise of clock signal CKM, an internal address signalis generated, and through the predecoder, the predecoded signals, ypr16and ypra, change. After the predecoded signals ypr16 and ypra are madedefinite and settled, in accordance with the activation of Y addresslatch designating signal caddlt, address latch control circuit 114activates the address set signals SETAN, SETDN and YRSTEN for theselected memory block. In accordance with the Y address set signalYRSTEN, latch circuit 43 latches the predecoded signal, ypra. Inaccordance with the change of predecoded signal, ypra, the signal,ltrel, defining a subbit line selecting operation is activated.

In accordance with the activation of Y address latch designating signalcaddlt, set/reset flip-flop 104 shown in FIG. 23 is reset, and thesubbit line discharge timing signal, ckdldcn, is activated.

On the other hand, precharge/sense control signal generating circuit 80shown in FIG. 23 activates the sense amplifier activation timing signal,fckdlsae, and the subbit line precharge end designating signal,fckdlpcend, at prescribed timings, respectively, in accordance withactivation of the signal ltrel. In accordance with the activation of Yaddress latch designating signal caddlt, set/reset flip-flop 106 is set,and in response, the reference current control signal, ckdlrefdc, is,activated, so that supply of the reference current starts.

When the signal ltrel is inactivated after a prescribed time period fromactivation of the sense amplifier circuit, the precharge end controlsignal fckdlpcend is inactivated by precharge/sense control signalgenerating circuit 80 and, further, the sense amplifier activationcontrol signal fckdlsae is inactivated.

In accordance with the activation of sense amplifier activation controlsignal, fckdlsae, the set/reset flip-flops 104 and 106 shown in FIG. 23are set and reset, the signal, ckdldcn, is inactivated, and the signal,ckdlrefdc, is inactivated. Accordingly, supply of the reference currentto the common bit line is stopped, and discharge of the memory cellcurrent in the subbit line is stopped.

Further, in accordance with the activation of sense amplifier activationcontrol signal, fckdlsae, the Y address latch circuit is reset, thesignal ltrel is inactivated in response, and in accordance withinactivation of the signal ltrel, the sense amplifier activation controlsignal, fckdlsae, and the subbit line precharge end control signal,fckdlpcend, are inactivated.

In the operation timing shown in FIG. 25, the signal yab16 from Yrelated operation start detecting circuit 118 is not used. This isbecause the signal yab16 is used in the output control circuit 7 shownFIG. 20, for controlling operations of the output buffer and the outputlatch, as will be described in detail later.

FIG. 26 schematically shows a construction of precharge/sense controlsignal generating circuit 80 shown in FIG. 23. Referring to FIG. 26,precharge/sense control signal generating circuit 80 includes: aninverter 120 receiving a test signal, tesdbdm <1>; an NAND gate 121receiving an output signal of inverter 120 and a test signal tesdbdm<0>; a decode circuit 122 activated when the output signal of NAND gate121 is at the H level, for decoding the precharge test timing signals,tesdpc <0> and tesdpc <1>; a decode circuit 123 activated when theoutput signal of NAND gate 121 is at the H level, for decoding the senseamplifier timing test signals, testrsa <1> and testrsae <0>; an inverter125 receiving the precharge timing test signal, testrpc; an inverter 126receiving an output signal nmgp of inverter 125 and generating a signal,pmgp; an inverter 127 receiving a sense amplifier activation timing testsignal, tesdsa; and an inverter 128 receiving the output signal nmgs ofinverter 127 and generating a signal, pmgs.

Decode circuits 122 and 123 are each a 2-bit decoder, which decodes anapplied test signal of 2 bits and generates a control signal of 4 bits.By decode circuits 122 and 123, the timing of activating the prechargeactivation timing signal and the sense amplifier activation timingsignal are changed.

Precharge/sense control signal generating circuit 80 further includes:delay circuits DLA0-DLA2 and DLB0 and DLB1 for delaying the signal ltrelapplied to an input node, in; a delay circuit DLC0 further delaying anoutput signal of delay circuit DLA2; inverters 127 and 129 invertingoutput signals of delay circuits DLB0 and DLB1, respectively; a buffercircuit 128 buffering an output signal of inverter 127 to generate asignal, ckdlpcendn; a tristate inverter 131 inverting an output signalof inverter 127 when activated; a tristate inverter 132 inverting anoutput signal of delay circuit DLA1 when activated; a tristate inverter133 inverting an output signal of inverter 129 when activated; atristate inverter 134 inverting an output signal of delay circuit DLA2when activated; and a tristate inverter 135 inverting an output signalof delay circuit DLC0 when activated.

Outputs of these tristate inverters 131-135 are coupled together.Tristate inverters 131-134 are selectively activated in accordance withan output signal of decode circuit 122, and tristate inverter 135 isactivated when the output signal, pmga, of inverter 124 is at the Hlevel.

Delay circuits DLA0-DLA2 and delay circuits DLB0-DLB1 are arrangedalternately. The amount of delay of delay circuits DLA0-DLA2 is set inaccordance with the output signals, nmga and pmga, of NAND gate 121 andinverter 124, while the amount of delay of delay circuits DLB0 and DLB1are set in accordance with the output signals, nmgp and pmgp, ofinverters 125 and 126. These delay circuits DLA0-DLA2 and DLB0, DLB1 arecurrent limited type delay circuits of which amount of driving currentis adjusted by reference voltages, dlypmg and dlynmg. These referencevoltages, dlypmg and dlynmg, are reference voltages, and in order tomaintain the voltage levels constant, they are transmitted usingshielded lines.

Further, the signal lines transmitting the signals, nmga and pmga, areconfigured to have sufficiently small parasitic capacitance. Thus, theinfluence on the load capacitance provided at the outputs of delaycircuits DLA0-DLA2 is reduced, and accurate delay time is set.

Precharge/sense control signal generating circuit 80 further includes:an inverter 126 receiving the test mode designating signal MTEST; an ANDcircuit 136 receiving an output signal of inverter 126 and an outputsignal of any of tristate inverters 131-135 and generating the prechargeend control signal, fckdlpcend; an inverter 132 receiving an outputsignal of inverter 126; an NOR gate 138 receiving an output signal ofdelay circuit DLC0 and an output signal of inverter 137; delay circuitsDLA3-DLA6 and DLB2-DLB4 delaying an output signal of any of tristateinverters 131-135; and cascaded delay circuits DLC1 and DLC2 fordelaying an output signal of delay circuit DLA6.

Delay circuits DLA3-DLA6 and delay circuits DLB2-DLB4 are arrangedalternately, and the amount of driving current thereof is adjusted inaccordance with the reference voltages, dlypmg and dlynmg. Further,output load of delay circuits DLA3-DLA6 is adjusted by the signals, nmgaand pmga. Further, output load of delay circuits DLAB2-DLB4 each isadjusted by the signals, nmgs and pmgs.

Precharge/sense control signal activating circuit 80 further includes:an inverter 139 receiving an output signal of delay circuit DLB3; aninverter 140 receiving an output signal of delay circuit DLB4; atristate inverter 141 inverting an output signal of inverter 139 whenactivated; a tristate inverter 142 inverting an output signal of delaycircuit DLA5 when activated; a tristate inverter 143 inverting an outputsignal of inverter 140 when activated; an inverter 144 inverting anoutput signal of delay circuit DLA6 when activated; a tristate inverter145 inverting an output signal of delay circuit DLC2, when activated;and an AND circuit 146 receiving an output signal of NOR gate 138 and anoutput signal of any of tristate inverters 141-145 and generating asense amplifier activation control signal, fckdlsae.

Tristate inverters 141-144 are selectively activated in accordance withan output signal of decode circuit 123, and tristate inverter 145 isactivated when the output signal, pmga, of inverter 124 is activated.

FIG. 27 shows an exemplary construction of delay circuits DLA0-DLA6shown in FIG. 26. In FIG. 27, delay circuits DLA0-DLA6 are the same inconfiguration, and therefore, one delay circuit DLA is shown as arepresentative.

Referring to FIG. 27, delay circuit DLA (DLA0-DLA6) includes: P channelMOS transistors PTA0-PTA3 connected in parallel between a power supplynode and a node 150 and receiving, at respective gates, the referencevoltage, dlypmg; a shorting interconnection line SRT forshort-circuiting between the power supply node and node 150; a P channelMOS transistor PTA4 connected between node 150 and output node 152 andhaving its gate connected to an input node IN; an N channel MOStransistor NTA2 connected between a node 151 and output node 152 andhaving its gate connected to input node IN; N channel MOS transistorsNTA0 and NTA1 connected between node 151 and a ground node and receivingat their gates the reference voltage, dlynmg; MOS capacitors CQA0-CQA5formed of N channel MOS transistors having respective gates connected toa node 153 and their sources and drains coupled to the ground node; MOScapacitors CQA6-CQA8 formed of N channel MOS transistors havingrespective gates connected to a node 154 and respective sources anddrains connected to the ground node; a P channel MOS transistor PTA5coupling node 153 to output node 152 in accordance with a controlsignal, pmga; and an N channel MOS transistor NTA3 for coupling the node154 to output node 152 in accordance with a control signal, nmga.

MOS capacitors DQA1-DQA3 are each formed of an MOS transistor having thegate, source and drain coupled to the ground node. These MOS capacitorsRQA1-DQA3 are formed to maintain layout regularity, and do not functionas a load to output node 152. Namely, they are arranged simply as dummycapacitors.

In delay circuit DLA, in accordance with the reference voltages, dlypmgand dlynmg, the amount of current driven by MOS transistors PTA0-PTA3and NTA0, NTA1 is defined. Therefore, the capability of MOS transistorsPTA4 and NTA2 for driving the output node 152 in accordance with thesignal applied to input node IN is limited by the MOS transistorsPTA0-PTA3 and NTA0 and NTA1, so that the speed of change in the outputis adjusted, whereby the circuit functions as a delay circuit. The shortinterconnection line SRT has its passing current amount adjusted by theline width thereof.

MOS transistors PTA5 and NTA3 couple MOS capacitors CQA0-CQA5 andCQA6-CQA8 to output node 152, when rendered conductive. The controlsignals, pmga and nmga, are complementary signals (see FIG. 26), andwhen the voltage level of output node 152 changes, the MOS capacitorsCQA0-CQA8 function as a capacitive load on output node 152, to slow downthe speed of change of the output signal OUT from output node 152.

In delay circuit DLA, for the P channel MOS transistor, currentsupplying transistors PTA0-PTA3 are provided greater in number than thecurrent supplying MOS transistors NTA0 and NTA1 for N channel MOStransistor NTA2. This is because the current drivability of a P channelMOS transistor is smaller than that of an N channel MOS transistor(provided that they have the same size). In order to adjust thedifference in current drivability, the amount of driving current of Pchannel MOS transistor PTA4 is increased, so as to adjust the speed ofrising and falling (equalize) of the output signal.

FIG. 28 schematically shows a construction of delay circuit DLB(DLB0-DLB4) shown in FIG. 26. As delay circuits DLB0-DLB4 have the sameconstruction, FIG. 28 shows one delay circuit DLB as a representative.Referring to FIG. 28, delay circuit DLB includes: P channel MOStransistors PTB0-PTB3 connected in parallel between the power supplynode and a node 155 and receiving, at respective gates, the referencevoltage dlypmg; a P channel MOS transistor PTB4 connected between node155 and an output node 157 and having its gate connected to an inputnode IN; N channel MOS transistors NTB0 and NTB1 connected between anode 156 and a ground node and receiving, at respective gates, thereference voltage dlynmg; an N channel MOS transistor NTB2 connectedbetween output node 157 and node 156 and having its gate connected toinput node IN; an MOS capacitor CQB0 formed of an N channel MOStransistor having its gate connected to a node 158 and its source anddrain nodes connected to the ground node; a P channel MOS transistorPTB5 electrically coupling node 158 to output node 157 in accordancewith a control signal pmg (pmgp or pmgs); an MOS capacitor CQB1 formedof an N channel MOS transistor having its gate connected to a node 159and its source and drain connected to the ground node; and an N channelMOS transistor NTB3 coupling node 159 to output node 157 in accordancewith the control signal nmg (nmgp or nmgs).

MOS capacitors BQB0-BQB4 are formed of N channel MOS transistorsarranged in parallel with MOS capacitor CQB0 and are arranged as dummycapacitors, with the gates, sources and drains coupled to the groundnode. Similarly, MOS capacitors BQB5-BQB9 arranged in parallel with MOScapacitor CQB1 are arranged as dummy capacitors, with the gates, drainsand sources coupled to the ground node. These dummy capacitors BQB0-BQB9are arranged simply to maintain layout regularity of the delay circuit.MOS capacitors CQB0 and CQB1 are smaller in size than MOS capacitorsCQA0-CQA5 and CQA6-CQA8 of delay circuit DLA shown in FIG. 27, andconfigured to have smaller capacitance value.

Delay circuit DLB shown in FIG. 28 also has the amount of drivingcurrent of output node 157 adjusted in accordance with the referencevoltages, dlypmg and dlynmg, and the delay time thereof set. MOScapacitors CQB0 and CQB1 are coupled to output node 157 when MOStransistors PTB5 and NTB3 are rendered conductive, and function as acapacitor when the voltage at output node 157 changes. Therefore, bythese MOS capacitors CQB0 and CQB1, the speed of change of the outputsignal OUT is slowed down.

In delay circuits DLA and DLB shown in FIGS. 27 and 28, as an issue indesign, parasitic capacitance of output nodes 152 and 157 is made assmall as possible, parasitic capacitance of source nodes of MOStransistors PTA4, PTB4, NTA2 and NTB2 for driving current is madesufficiently small, so as to eliminate unnecessary cause of delay and toprovide the delay time close to the designed value.

Delay circuits DLC0-DLC2 are delay elements with the amount of drivingcurrent adjusted, and they do not perform inversion of input signallogic level.

Again returning to FIG. 26, when the test mode designating signal MTESTis at the H level, the inverted test mode designating signal MTESTNapplied to sense/precharge control signal generating circuit 80 is atthe L level, and the output signal, fckdlpcend, of AND circuit 136 is atthe L level. Further, as the output signal of inverter 137 attains tothe H level, the output signal of NOR gate 138 attains to the L level,and the signal, fckdlsae, from AND circuit 146 is at the L level.Therefore, when the test mode designating signal MTEST is active, thedecoder and the address latch circuit are not reset, the subbit line isnot precharged, and internal reading is stopped.

FIG. 29 schematically shows an equivalent construction ofprecharge/sense control signal generating circuit 80 in a normal readmode. Referring to FIG. 29, precharge/sense control signal generatingcircuit 80 includes: a first delay circuit 150 delaying an input signal,ltrel, by a prescribed time period in the normal read mode; an ANDcircuit 136 generating the precharge control timing signal, fckdlpcend,in accordance with an output signal of the first delay circuit 150; asecond delay circuit 151 further delaying an output signal of the firstdelay circuit 150; and an AND circuit 146 generating a signal, fckdlsae,in accordance with output signals from the first and second delaycircuits 150 and 151. From an intermediate delay stage in the firstdelay circuit 150, the signal, clkdlpcendn, is generated.

The first delay circuit 150 includes delay stages DLA0-DLC0, while thesecond delay circuit 151 includes delay stages DLA2-DLC2.

FIG. 30 is a timing diagram representing an operation of precharge/sensecontrol signal generating circuit 80 shown in FIG. 29. In the following,an operation of precharge/sense control signal generating circuit 80shown in FIG. 29 at the time of normal data reading will be describedwith reference to FIG. 30.

Referring to FIG. 30, the internal read operation start designatingsignal, ltrel, attains to the H level, and after a prescribed timeperiod, the signal, clkdlpcendn, from the intermediate stage in firstdelay circuit 150 falls to the L level. As shown in FIG. 23, by thesignal clkdlpcendn or the Y address latch designating signal caddl, thetiming of discharging the reference current is defined.

After the delay time of the first delay circuit 150, the output signal,fckdlpcend, of AND circuit 136 attains to the H level, and after thedelay time of the second delay circuit 151, the signal, fckdlsae, fromAND circuit 146 rises to the H level.

When the output signal, fckdlsae, of AND circuit 146 rises to the Hlevel, the decoder and the address latch circuit are reset as describedin the first embodiment previously, and the signal, ltrel, attains tothe inactive state of L level. In response, the signal, clkdlpcendn,attains to the inactive state of H level, and output signals, fckdlpcendand fckdlsae, of AND circuits 136 and 146 attain to the L level.

In a timing test, the test mode designating signal MTEST is set to the Llevel, and in response, the signal MTESTN attains to the H level. Inthis state, the test bits tesdbdm <0:1> are set to (1, 0), respectively.In response, the output signal of NAND gate 121 attains to the L level,the control signals pmga and nmga attain to the H level and L level,respectively, output load of delay stages DLA0-DLA6 are isolated fromrespective output nodes, and the delay time becomes shorter. Tristateinverter buffers 135 and 145 are activated in accordance with thecontrol signal, pmga. As decode circuits 122 and 123 are inactive, whenthe test timing designating signals, testrpc and tesdbsa, are set to theL level, the output load control signals nmgp, pmgp and nmgs and pmgs tothe delay stages DLB0-DLB1 and delay stages DLB2-DLB4 can be activated.In response, delay times of the first and second delay circuits 150 and151 can be made longer.

When test bits teddbdm <0:1> are at the state other than that describedabove, the output signal of NAND gate 121 attains to the H level, thecontrol signals pmga and nmga responsively attain to the L level and Hlevel, respectively, and tristate inverter buffers 135 and 145 are setto the output high impedance state. Further, output loads of delaystages DLA0-DLA6 become effective. Decode circuits 122 and 123 areenabled, to select the tristate inverter selection signal in accordancewith test bits tesdpc <0:1> and tesdsa <0:1>, and it becomes possible toperform the test while adjusting the timing of activating the prechargeend activation control signal, fckdlpcend, and the sense amplifieractivation control signal, fckdlsae.

By appropriately setting the delay times of the first and second delaycircuits 150 and 151 to the exact time based on the result of testing,the timing of reading operation shown in FIG. 9 can accurately bedetermined.

FIG. 31 shows in detail the construction of Y decoder 13 shown in FIG.16. The Y decoder shown in FIG. 31 generates Y related control signalsfor the corresponding memory block, in accordance with the output signalfrom sense amplifier control circuit 60A or 60B shown in FIG. 20.

Referring to FIG. 31, Y decoder 13 includes: an NAND gate 161 receivingthe test control signals, tesdbdm <1> and tesdbdm <0>; an inverter 162receiving an output signal of NAND gate 161; an NOR gate 163 receivingan output signal of inverter 162 and the test mode designating signalMTEST; an MOS gate 164 receiving the test mode designating signal MTESTand an output signal from NAND gate 161; an AND gate 125 receiving anoutput signal of NOR gate 163 and the sense amplifier activation controlsignal (reset signal), ckdlsae; an AND gate 166 receiving an outputsignal of NOR gate 164 and the sense amplifier activating signal sae(SAE); an NOR gate 167 receiving output signals of AND gates 125 and166; an inverter 168 receiving the internal read start designatingsignal, ltyrel; OR circuits OG0-OG2 each receiving an output signal ofNOR gate 167 and an output signal of inverter 168 and generating thereset signals RST <2>-RST <0>; an inverter 169 receiving the read modedesignating signal MDSA; an NAND gate 170 receiving a memory mat trainspecifying predecode signals, lta16 <0:1>, the internal read startdesignating signal, ltyrel, and the read mode designating signal MDSA;an NOR gate 172 receiving an output signal of NAND gate 170 and anoutput signal of inverter 168; an NAND gate 174 receiving the memory mattrain specifying predecode signals lta16 <0:1>, the internal read startdesignating signal ltyrel and the read mode designating signal MDSA; anNOR gate 176 receiving an output signal of NAND gate 174 and an outputsignal of inverter 168; and a subbit line selection signal generatingcircuit 182 aj receiving the latch predecoded signals ltyra <4:7>, theinternal read start designating signal, ltyrel, and an output signal ofOR gate OG0, and generating, when enabled, a subbit line selectionsignals, yrajn <4:7>, in accordance with the received latch predecodesignals, ltyra <4:7>.

Y decoder 13 further includes: a subbit line selection signal generatingcircuit 182 ajl receiving the latch predecode signals ltyra <0:3>, theinternal read start designating signal ltyrel and an output signal of ORgate OG2 and generating subbit line selection signals yrajn <0:3>; areference current control signal generating circuit 184 receiving thereference current discharge control signal, ckdlrefdc, and an outputsignal of NOR gate 172 and generating the reference current dischargecontrol signal, refdcjn; a sense amplifier activating signal generatingcircuit 186.receiving the power supply voltage vdd and the senseamplifier activation control signal, ckdlsae, and generating the senseamplifier activating signal sae; a precharge control signal generatingcircuit 187 receiving the signal ltyrel and the bit line precharge endcontrol signal, ckdlpcend, and generating a precharge end signal, pcend;and a common bit line selection signal generating circuit 188 receivingthe latch predecoded signals ltyre <0:3>, the signal ltyrel and anoutput signal of OR gate OG1, and generating a common bit line selectionsignal yrbls <0:3>.

Y decoder 13 further includes: a reference current control signalgenerating circuit 184 k for generating the reference current controlsignal, refdckm, in accordance with the reference current dischargetiming control signal, ckdlrefdc, and an output signal of NOR gate 176;a subbit line selection signal generating circuit for 182 akh generatingthe subbit line selection signals yrakn <4:7> in accordance with thelatch predecode signals ltyra <4:7>, the signal ltyrel and an outputsignal of OR gate OG1; a subbit line selection signal generating circuit182 bkl receiving the latch predecoded signals ltyra <0:3>, an outputsignal of OR gate OG0 and the signal ltyrel, and generating the subbitline selection signals yrakn <0:3>; a subbit line discharge controlcircuit 180 k receiving an output signal of inverter 178, the signalltyrel and the discharge timing control signal ckdldc, and generating asubbit line discharge control signal, bitlowkn; and a subbit linedischarge control circuit 180 j receiving an output signal of inverter169, the signal ltyrel and the subbit line discharge control signalckdldc, and generating a subbit line discharge control signal, bitlowjn.

The subbit line discharge control signal, bitlowjn, is a control signalfor discharging the selected subbit line of memory mat MMj to the groundvoltage level. Subbit line discharge control circuit 180 j includes: anAND gate GG1 receiving the discharge control signal ckdldc and thesignal ltyrel; an NOR gate GG2 receiving an output signal of AND gateGG1 and an output signal of inverter 169; and cascaded inverters VG1 andVG2 of two stages, receiving an output signal of NOR gate GG2 andgenerating the subbit line discharge control signal, bitlowjn.

Subbit line discharge control circuit 180 k has the same construction assubbit line discharge control circuit 180 j. Inverters 169 and 178 bothinvert the read mode designating signal MDSA, and therefore, the subbitline discharge control signals, bitlowjn and bitlowkn, areactivated/inactivated at the same timing.

Subbit line selection signal generating circuits 182 ajh, 182 ajl, 182akh and 182 bkl have the same construction, and FIG. 31 shows aconstruction of a portion of subbit line selection signal generatingcircuit 182 ajh generating the subbit line selection signal.

Subbit line selection signal generating circuit 182 ajh includesselection signal generation circuits 190 a-190 d receiving the latchpredecoded signals ltyra <7:4>, the signal ltyrel and an output signalof OR gate OG2, for generating the bits yrajn <7:4>. Corresponding torespective bits of the predecode signals ltyra <4:7>, selection signalgenerating circuits 190 a-190 d are provided to generate the respectivebits yrajn <7:4>. These selection signal generating circuits 190 a-190 dhave the same construction, and FIG. 31 shows the construction ofselection signal generating circuit 190 a as a representative.

Selection signal generating circuit 190 a includes: an NAND gate GG3receiving the internal read operation start designating signal ltyrel,the latch predecoded signal ltyra <7> and the reset signal RST<2>; andcascaded inverters VG3 and VG4 of two stages for receiving an outputsignal of NAND gate G&3 and generating a bit yrajn <7>.

By subbit line selection signal generating circuits 182 ajh and 182 ajl,the subbit line selection signals yrajn <0:7> for memory mat MMj aregenerated.

Reference current control signal generating circuits 184 j and 184 khave the same construction and in FIG. 31, the construction of referencecurrent control signal generating circuit 184 j is shown as arepresentative. Reference current control signal generating circuit 184j includes: an NAND gate GG4 receiving an output signal of NOR gate 172and the reference current discharge control signal, ckdlrefdc; andcascaded inverters VG5 and VG6 of two stages for receiving an outputsignal of NAND gate GG4 and generating the reference current controlsignal, refdcjn. The reference current control signal, refdcjn,corresponds to the control signal VFDCjN shown in FIG. 8. To NAND gate170, the latch predecoded signal lta16 <0> designating a memory mat MMkis applied, and to NAND gate 174, the latch predecoded signal lta16 <1>designating the memory mat MMj is applied. Therefore, when memory matMMk is selected, the reference current control signal, refdcjn, attainsto the L level in accordance with the reference current dischargecontrol signal ckdldc, and the reference current is driven by the memorymat MMj.

Sense amplifier activating signal generating circuit 186 includes: anNAND gate GG5 receiving the power supply voltage vdd and the senseamplifier activation control signal (reset timing signal), ckdlsae; andcascaded inverters VG7-VG9 of three stages for receiving an outputsignal from NAND gate GG5. The sense amplifier activating signal, sae,is output from inverter VG9.

Sense amplifier activating signal generating circuit 186 is essentiallya buffer circuit, and generates the sense amplifier activating signal,sae, in accordance with the sense amplifier activation timing controlsignal, ckdlsae.

Precharge end control signal generating circuit 187 includes: an NANDgate GG6 receiving the signal, ltyrel, and the precharge end activatingsignal, ckdlpcend; and cascaded inverters VG10-VG12 of three stages forreceiving an output signal of NAND gate GG6. The precharge enddesignating signal, pcend, is output from the inverter VG12 of the laststage.

In the construction of Y decoder 13 shown in FIG. 31, when the test modedesignating signal MTEST is at the H level, output signals of NOR gates163 and 164 are at the L level, the output signal of NOR gate 167attains to the H level, and output signals RST <0>-RST <2> of ORcircuits OG0-OG2 all attain to the H level. Consequently, resettingoperation responsive to the sense amplifier activating timing on subbitline selection signal generating circuits 182 ajh, 182 ajl, 182 akh and182 bkl is inhibited. In this case, as shown in FIG. 26, the invertedsignal MTESTN of the test mode designating signal MTEST is at the Llevel, the control signals, fckdlpcend and fckdlsae, are fixed at the Llevel, and the internal data is not read.

When the test mode designating signal MTEST is at the L level, and thetest mode designating signals tesddbdm <1> and tesdbdm <0> are both setto the H level, then the output signal of NAND gate 161 attains to the Llevel and the output signal of inverter 162 attains to the H level.Therefore, in this case, the output signal of NOR gate 164 attains tothe H level, and in accordance with the sense amplifier activatingsignal, sae, the output signal of NOR gate 167 attains to the L level.As the output signal of inverter 168 is at the L level, output signalsRST <0:2> of OR circuits OG0-OG2 attain to the L level, subbit lineselection signal generating circuits 182 ajh, 182 ajl, 182 akh and 182bkl are reset, and the subbit line selection signals yrajn <0:7> andyrakn <0:7> and the bit line selection signals yrbn <0:3> are allreturned to the initial state.

When the output signal of NAND gate 161 is at the H level, the outputsignal of NOR gate 163 attains to the H level, and in accordance withthe sense amplifier activation timing control signal, ckdlsae, theoutput signal of NOR gate 167 attains to the L level. Therefore, in thiscase, in accordance with the sense amplifier activation timing controlsignal, ckdlsae, the subbit line selection signals yrajn <0:7> and yrakn<0:7> and the common bit line selection signals yrabn <0:3> are reset.

Therefore, when the timings of sense amplifier activation and subbitline precharging are to be adjusted in the construction ofprecharge/sense control circuit 80 shown in FIG. 26, the Y relatedcircuits can be reset in accordance with the adjusted timing of senseamplifier activation.

In a normal operation mode, the output signal of one of NOR gates 163and 164 attains to the H level, and in accordance with the senseamplifier activating signal, sae, or the sense amplifier activationtiming control signal, ckdlsae, the selecting operation of the subbitline and the common bit line is reset (in the first embodiment, the Ydecoder is reset in accordance with the sense amplifier activationtiming control signal ckdlsae).

In the normal operation mode, in data reading, the read mode designatingsignal MDSA attains to the H level, and the output signal of inverter169 is at the L level. Therefore, in accordance with activation of theread operation start timing control signal, ltyrel, the bit linedischarge control signals, bitlowjn and bitlowkn, attain to the L levelin accordance with the bit line discharge control signal ckdldc, anddischarge of the subbit line is stopped.

As can be seen from FIG. 26, in the read operation mode, the test modedesignating signal MTEST is at the L level (signal MTESTN is at the Hlevel), and based on the internal read start designating signal ltrel,the signals, ckdlpcend and ckdlsae, are generated.

In the normal operation mode, when the signals ltyrel and MDSA bothattain to the H level, NAND gates 170 and 174 are enabled, and inaccordance with the latch predecodes signal lta16 <0:1>, a train of thememory mat is designated. In FIG. 31, to NAND gate 170, the latchpredecoded signal lta16 <0> is applied, and to NAND gate 174, the latchprecoded signal lta16 <1> is applied, as an example. In the selectedmemory block, the output signal of NAND gate 170 or 174 corresponding tothe unselected memory mat train attains to the L level.

At the time of data reading, the signal ltyrel is at the H level, theoutput signal of inverter 168 attains to the L level in response, andNOR gates 172 and 176 each operate as an inverter. Therefore, thereference current control signal generating circuits 184 j and 184 kdrive, when the corresponding memory mat does not include the selectedmemory cell, the reference current control signal, refdcjn or refdckn,to the L level, in accordance with the reference current dischargetiming control signal, ckdlrefdc, respectively. Accordingly, as in thetest operation described above, the reference current driving source isconnected to the reference memory mat.

Subbit line selection signal generating circuits 182 ajh, 182 ajl, 182akh and 182 bkl generate, when the signal ltyrel is at the H level andthe output signals (reset signal RST) of OR circuits OG0-OG2 are at theH level, the subbit line selection signals yrajn <0:7> and yrakn <0:7>as well as the common bit line selection signal yrbn <0:3>, inaccordance with applied latch predecoded signals ltyra <0:7> and ltyrb<0:3>, respectively.

Precharge control signal generating circuit 187 drives the precharge endsignal, pcend, to the H level when the signal ltyrel is at the L leveland the precharge end timing control signal, ckdlpcend, attains the Hlevel, and to the L level when one of the signals, ltyrel and ckdlpcend,is at the L level.

Therefore, in the construction of Y decoder 13 shown in FIG. 31 also,when the test mode designating signal MTEST is at the H level, reset ofthe subbit line selection signal and the common bit line selectionsignal by the sense amplifier activating signal, sae, or the senseamplifier activation timing control signal, ckdlsae, is stopped. Whenthe test mode designating signal MTEST is at the L level, the subbitline selection signals yrajn <0:7> and yrakn <0:7> and the common bitline selection signals yrbn <0:3> are reset, in accordance with thesense amplifier activating signal sae or the sense amplifier activationtiming control signal ckdlsae.

FIG. 32 shows an example of a specific constructions of output latch 72and output buffer 74 shown in FIG. 22. Referring to FIG. 32, outputlatch 72 includes: an inverter 190 receiving the main bit line prechargedesignating signal mblpcn; P channel MOS transistors TP1 and TP2precharging, when the output signal of inverter 190 is at the L level,read main bit lines, rmblj and rmblk, to the level of the power supplyvoltage Vdd, respectively; a p channel MOS transistor TP3 renderedconductive when the read main bit line rmlj is at the L level, andcharging the read main bit line, rmblk to the level of the power supplyvoltage Vdd; a CMOS inverter 191 inverting and transmitting to internalnode 210, the potential of read main bit line rmblk, when activated; aCMOS inverter 193 inverting and transmitting to an internal node 212 apotential of read main bit line rmblk, when activated; a CMOS inverter194 inverting and transmitting to internal node 212 a signal on readmain bit line rmblj, when activated; an inverter 195 inverting andtransmitting to output buffer 74 a signal of internal node 210; and aninverter 196 inverting and transmitting to output buffer 72 a signal ofinternal node 212.

The power supply voltage Vdd may be the voltage from the same powersource as that for power supply voltage vdd used in the Y decoder, or itmay be a power supply voltage from a power source dedicated for theoutput.

Output latch 72 performs an operation of amplifying the signals on readmain bit lines rmlj and rmblk and transmitting the amplified signals tooutput buffer 74, and an operation of exchanging the data of read mainbit lines rmblj and rmblk for transmission to output buffer 74. As willbe described in greater detail later, this is because data inversionbecomes necessary dependent on the position of the selected memory mat,in order to generate a single end internal read data dotqd (Q <m>) fromthe differential signal between read main bit lines rmblj and rmblk.

In order to control activation/inactivation of output latch 72, thefollowing components are provided: an inverter 200 receiving an outputlatch reset signal rstqd; a delay stage 201 delaying an output signal ofinverter 200 by a prescribed time period; an AND gate 202 receiving anoutput signal of delay stage 201 and the output signal of inverter 200;an inverter 203 receiving an output of AND gate 202; an NAND gate 204receiving an output signal of inverter 203 and the selected memory matdesignating signal selj; an inverter 205 receiving an output signal ofNAND gate 204; an NAND gate 206 receiving an output signal of inverter203 and the selected memory mat designating signal selk; an inverter 207receiving an output signal of NAND gate 206; P channel MOS transistorsTP4 and TP6 rendered conductive when the output signal of NAND gate 204is at the L level, and coupling high-side power supply nodes of CMOSinverters 191 and 193 to a power supply node, respectively; N channelMOS transistors TN1 and TN3 rendered conductive when the output signalof inverter 205 is at the H level, and coupling low-side power supplynodes of CMOS inverters 191 and 193 to the ground node, respectively; Pchannel MOS transistors TP5 and TP7 rendered conducive when the outputsignal of NAND gate 206 is at the L level, and connecting high-sidepower supply nodes of CMOS inverters 192 and 194 to the power supplynode, respectively; N channel MOS transistors TN2 and TN4 renderedconductive when the output signal of inverter 207 is at the H level, andcoupling low-side power supply nodes of CMOS inverters 192 and 194 tothe ground node, respectively; an N channel MOS transistor TN5 couplingan internal node 212 to the ground node when the output signal of ANDgate 202 is at the H level; and a P channel MOS transistor TP8 renderedconductive when the output signal of inverter 203 is at the L level, andcoupling the internal node 210 to the power supply node.

The portion for generating the control signals may be provided commonlyto all the output latches in the output latch circuit, or it may bearranged corresponding to each output latch, for each read data bit.

The selected memory mat designating signals, selj and selk, aregenerated based on the mat selection signals, selbootk and selbootj,generated by selected mat detecting circuit 116 shown in FIG. 24.Inverter 200, delay stage 201 and AND gate 202 form an inversion falldelay circuit, and generate a signal that falls to the L level when thereset signal, rstqdbn, rises to the H level, and rises to the H levelafter the delay time of delay stage 201 when the reset signal, rstqdbn,falls to the L level.

As will be described in greater detail later, the main bit lineprecharge signal, mblpcn, is generated based on the monitor signal MSAE,from the output control circuit.

In output latch circuit 72, when the main bit line precharge signalmblpcl is at the H level, the output of CMOS inverter 190 attains to theL level, so that MOS transistors TP1 and TP2 turn on, to set the readmain bit lines, rmblj and rmblk, to the level of the power supplyvoltage Vdd, respectively.

When the reset signal, rstqdbn, attains to the L level, the outputsignal of AND gate 202 attains to the H level after the delay time ofdelay stage 201, and the output signal of inverter 203 attains to the Llevel. In response, MOS transistors TN5 and TP8 turn on, so thatinternal node 212 is set to the level of the ground voltage Vss and theinternal node 210 is set to the level of power supply voltage Vdd.

When the reset signal, rstqdbn, is at the H level, the output signal ofinverter 200 is at the L level, and the output signal of AND gate 202 isat the L level. Therefore, in this state, MOS transistors TN5 and TP8are kept off.

When the output signal of inverter 203 is at the H level, NAND gates 204and 206 are enabled, to invert the selected memory mat designatingsignals, selj and selk, respectively. When the selected memory matdesignating signal, selj, is at the H level, the selected memory matdesignating signal, selk, is at the L level. In this state, the outputsignal of NAND gate 204 attains to the L level, MOS transistors TP4,TN1, TP6 and TN3 turn on, CMOS inverters 191 and 193 are enabled, sothat the signal potentials on read main bit lines, rmblj and rmblk, areinverted and transmitted to internal nodes 210 and 212, respectively.

On the contrary, when the selected memory mat designating signal, selj,is at the L level and the selected memory mat designating signal, selk,is at the H level, the output signal of NAND gate 206 attains to the Llevel, and the output signal of NAND gate 204 attains to the H level.CMOS inverters 191 and 193 attain to the output high impedance state. AsMOS transistors TP5, TN2, TP7 and TN4 turn on, CMOS inverters 192 and194 are enabled, so that signal potentials on read main bit lines, rmbljand rmblk, are inverted by CMOS inverters 194 and 192, respectively, andtransmitted to internal nodes 212 and 210.

The voltages of internal nodes 210 and 212 are inverted by inverters 195and 196 and transmitted to output buffer 74.

Output buffer 74 includes: an inverter 208 receiving an output signal ofinverter 196; an inverter 209 receiving an output signal of inverter195; a P channel MOS transistor TP9 rendered conductive when the outputsignal of inverter 195 is at the L level, and coupling an internal node214 to the power supply node; an N channel MOS transistor TN6 renderedconductive when the output signal of inverter 208 is at the H level, andcoupling internal node 214 to the ground node; an N channel MOStransistor TP10 rendered conductive when the output signal of inverter196 is at the L level, and coupling internal node 216 to the powersupply node; an N channel MOS transistor TN7 rendered conductive whenthe output signal of inverter 209 is at the H level, and couplinginternal node 216 to the ground node; an CMOS inverter 197 inverting andtransmitting to internal node 216 the signal on internal node 214, whenactivated; a CMOS inverter 198 inverting and transmitting to internalnode 214 the signal on internal node 216, when activated; and a CMOSinverter 199 inverting the signal on internal node 216 and generating aninternal output data dotqb (Q <m>).

Output buffer 74 further includes: a P channel MOS transistor TP11rendered conductive when the output signal of inverter 208 is at the Llevel, and coupling the high-side power supply node of CMOS inverter 197to the power supply node; an N channel MOS transistor TN8 renderedconductive when the output signal of inverter 196 is at the H level andcoupling a low-side power supply node of CMOS inverter 197 to the groundnode; a P channel MOS transistor TP12 rendered conductive when theoutput signal of inverter 209 is at the L level and coupling a high-sidepower supply node of CMOS inverter 198 to the power supply node; an Nchannel MOS transistor TN9 rendered conductive when the output signal ofinverter 195 is at the H level and coupling a low-side power supply nodeof CMOS inverter 198 to the ground node; and MOS capacitors CPP and CPNcoupled to internal node 214.

MOS capacitor CPP is formed of a P channel MOS transistor having itsgate coupled to internal node 214 and its source and drain nodes coupledto the power supply node. MOS capacitor CPN is formed of an N channelMOS transistor having its gate coupled to internal node 214 and itssource and drain coupled to the ground node. Therefore, when internalnode 214 is at the H level, MOS capacitor CPN functions as a capacitorelement, and when internal node 214 is driven to the level of the groundvoltage, MOS capacitor CPP functions as a capacitor element. By theseMOS capacitors CPP and CPN, a load that imitates the gate capacitance ofCMOS inverter 199 is connected to internal 214, so as to equalize theloads on internal nodes 214 and 216.

When output latch 72 is in a reset state, internal node 210 is at thelevel of power supply voltage Vdd and internal node 212 is at the levelof ground voltage Vss. Therefore, output signals of inverters 195 and196 attain to the L level and H level, respectively, MOS transistor TP9is on, MOS transistor TP10 is off, and internal node 214 is kept at thelevel of the power supply voltage Vdd. MOS transistors TP11 and TN8 turnon, so that CMOS inverter 197 is activated to invert and transmit tointernal node 216 the signal at the level of the power supply voltageVdd on internal node 214, and in response, internal node 216 is kept atthe level of the power supply voltage.

At this time, the voltage level of internal node 210 of output latch 72is at the power supply voltage level, and the output signal of inverter209 is at the H level. Therefore, MOS transistor TN7 turns on, andinternal node 216 is coupled to the ground node. The output signal ofinverter 209 is at the H level and the output signal of inverter 195 isat the L level. Therefore, MOS transistors TP12 and TN9 are off, andCMOS inverter 198 enters the output high impedance state. Therefore, inthis set state, the internal node 214 is at the level of the powersupply voltage Vdd, and internal node 216 is at the level of the groundvoltage Vss.

In the internal data read mode, in accordance with the output signals ofinverters 195 and 196, one of the CMOS inverters 197 and 198 isactivated, and the other is inactivated (output high impedance state).Therefore, internal node 216 is set to the level according to the outputsignals of inverters 195 and 196, and by inverter 199, internal outputdata dotqd (Q <m>) is generated.

By way of example, when the output signal of inverter 195 is at the Hlevel and the output signal of inverter 196 is at the L level, MOStransistors TM6 and TP10 turn on, and internal nodes 214 and 216 aredriven to the levels of the ground voltage Vss and the power supplyvoltage Vdd, respectively. In this case, CMOS inverter 198 is activated,inverts the signal at the H level on internal node 216, and transmitsthe L level signal to internal node 214. By inverter 198 and MOStransistors TN6 and TP10, voltage levels of internal nodes 214 and 216are maintained.

FIG. 33 shows an example of a specific construction of output controlcircuit 7 shown in FIG. 20. Referring to FIG. 33, output control circuit7 includes: a buffer circuit 220 receiving the selection signalselbootk; an inverter 221 receiving the selection signal, selbootj; aflip-flop 222 reset in response to activation of the reset signal,restbcn and taking the Y related operation start designating signalyab16 in response to activation of the Y address latch designatingsignal caddlt; an AND gate 223 receiving a signal from an output q offlip-flop 222 and an output signal from inverter 211; an NOR gate 224receiving an output signal of buffer circuit 220 and an output signal ofAND gate 223; an inverter 225 receiving an output signal of NOR gate224; a buffer circuit 226 delaying an output signal of inverter 225 by aprescribed time period and generating a selected memory mat designatingsignal selk; an inversion buffer circuit 227 inverting and delaying by aprescribed time period the output signal of inverter 225 and generatingthe selected memory mat designating signal selj; and a main bit lineprecharge control signal generating circuit 228 receiving monitorsignals msaen00-msaen03 and msaenb0, and generating the main bit lineprecharge designating signal mblpcn.

As will be described in detail later, the memory array is divided into10 trains of memory mats, and corresponding to each pair of memory mattrains, a train of sense amplifiers (sense amplifier band) is arranged.Sense amplifier activating signals are generated corresponding to eachof the five trains of sense amplifiers. By the sense amplifier controlcircuit (see FIG. 23) arranged corresponding to each sense amplifiertrain (band), monitor signals msaen00-msaen03 and msaenb0 are generated,corresponding to these sense amplifier activating signals. The monitorsignals msaen00-03 and msaenb0 each correspond to the monitor signalmsaen (MSAE) generated from the sense amplifier control circuit shown inFIG. 23, of which logic level is inverted from that of monitor signalMSAE. At the time of sensing operation, any of the monitor signalsmsaen00-msaen03 and msaenb attains to the L level (monitor signal MSAEattains to the H level), signaling that the corresponding senseamplifier train (band) is activated.

Main bit line precharge control signal generating circuit 228 includes:an NAND gate GD1 receiving monitor signals msae00-msae02; an NAND gateGD2 receiving the power supply voltage Vdd and monitor signals msae03and msaeb0; NOR gates GR1 and GR2 having output nodes coupled togetherand receiving respective output signals of NAND gates GD1 and GD2; and abuffer circuit GV1 buffering a signal from the common output node of NORgates GR1 and GR2, and generating the main bit line prechargedesignating signal, mblpcn.

When the monitor signals msaen00-msaen03 and msaenb0 all attain to the Hlevel, output signals of NAND gates GD1 and GD2 attain to the L level,and the output signals of NOR gates GR1 and GR2 attain to the H level.In response, the main bit line precharge designating signal, mblpcn,from buffer circuit GV1 attains to the H level, precharging of the readmain bit lines, rmblj and rmblk, starts and the internal read data isreset at the output latch.

When sensing operation is performed and at least one of the monitorsignals msaen00-msaen03 and msaenb0 is activated and attains to the Llevel, the output signal of at least one of NAND gates GD1 and GD2attains to the H level, and the output signals of NOR gates GR1 and GR2attain to the L level. In response, the main bit line prechargedesignating signal, mblpcn, from buffer circuit GV1 attains to the Llevel, the output signal from inverter 190 shown in FIG. 32 attains tothe H level, precharging of read main bit lines, rmblj and rmblk, ends,and the signal transferred over the read main bit line is latched.

Output control circuit 7 further includes: an NAND gate 229 receivingthe reset signals, rstqdbend and restbffn; an inverter 230 inverting anoutput signal of NAND gate 229; a one shot pulse generating circuit 231for generating a one shot pulse signal in response to the rise of the Yaddress latch designating signal caddlt; a one shot pulse generatingcircuit 232 for generating a one shot pulse signal in response to therise of the main bit line precharge designating signal, mblpcn; aset/reset flip-flop 234 reset when one of the output signals of inverter230 and one shot pulse generating circuit 231 is at the L level, and setwhen the output signal of one shot pulse generating circuit 232 is atthe L level; an inverter 235 receiving an output signal of set/resetflip-flop 234; cascaded inverters 236 and 237 of two stages, forbuffering the output signal of inverter 235 and generating an inputbuffer enable signal fil_enidbn; an inverter 238 inverting an outputsignal of inverter 236; and a buffer circuit 240 buffering an outputsignal of inverter 238 and generating a reset signal, rstqdbn.

Buffer circuit 240 includes, at its input portion, an NAND gate thatreceives the power supply voltage Vdd and the output signal of inverter238, and the NAND gate operates as an inverter. Therefore, buffercircuit 240 is equivalently formed by an even-number of stages (4 stagesin FIG. 33) of inverters, and buffers the output signal of inverter 238to generate the reset signal, rstqdbn.

The signals, mblpcn and rstqdbn, from output control circuit 7correspond to the reset signal QRST shown in FIG. 20, and in accordancewith these signals, precharging of the read main bit lines rmblj andrmblk and resetting of the internal node of the output latch areperformed, as shown in FIG. 33.

FIG. 34 is a timing diagram representing an operation of output controlcircuit 7 shown in FIG. 33. The operation of output control circuit 7shown in FIG. 33 will be described in the following with reference toFIG. 34.

In a read cycle of performing data reading, in response to the rise ofclock signal CKM, the reset signals, restbcn and restbff, attain to andkept at the L level for a prescribed time period. In response, theoutput signal of NAND gate 229 attains to the H level, and the outputsignal of inverter 230 attains to the L level. In this state, the mainbit line precharge signal, mblpcn, has already been raised to the Hlevel, the output signal of one shot pulse generating circuit 232 is atthe H level, the output state of set/reset flip-flop 234 does notchange, the output signal of inverter 235 is at the L level, and thereset signal rstqdben is kept at the H level.

When the reset signals, restbffn and restbcn, attain to the H level, theY address latch signal caddlt attains to the H level. Flip-flop 222 isreset in accordance with activation of the reset signal, restbcn, andthen latches, in accordance with the Y address latch signal caddlt, thesignal, yab16, designating the start of internal column selectingoperation, which has been already made definite and settled by thepredecoding operation, to produce an H level signal from an output q.

Further, by the time the Y address latch designating signal caddlt isactivated, the predecode operation has been performed by the predecoder,so that the states of selection signals, selbootk and selbootj, havebeen decided. Therefore, the selection signals selk and selj from buffercircuit 226 and inversion buffer circuit 227 have their states set inaccordance with these selection signals, selbootk and selbootj.

In response to activation of the reset signal restbffn, the outputsignal of inverter 230 attains to the L level, and flip-flop 234 isreset. In response, the output signal of inverter 236 attains to the Llevel, the buffer reset signal, rstwdbn, from buffer circuit 240 attainsto the H level, and the reset state of the internal node of the outputlatch is released, to enter the state of waiting for data reading.

Further, the output signal of one shot pulse generating circuit 231attains to and kept at the L level for a prescribed time period inresponse to the rise of Y address latch designating signal caddlt,flip-flop 234 is reset, the output signal of inverter 235 attains to theH level, flip-flop 234 that has been reset at the fall of reset signalrestbffn is reset reliably in response, and the buffer reset signal,restqdbn, is kept at the H level. In response to the activation of Yaddress latch designating signal caddlt, the reset signal, rstqdbend,attains to the L level, and the reset signal, rstqdbn, is surelymaintained at the inactive state.

When the reset signal, rstqdbn, is inactivated, the output signal ofinverter 203 attains to the H level, and in accordance with the selectedmemory mat designating signals selj and selk, the data transfer path inthe output latch is established, as shown in FIG. 32.

When the subbit line selection and sense amplifier activation areperformed internally, the monitor signal MSAE is activated insynchronization with the activation of the sense amplifier. When themonitor signal MSAE is activated (when either one of the monitor signalsmsaen00-msaen03 and msaenb0 attains to the L level), the main bit lineprecharge signal, mblpcn, attains to the L level, the prechargingoperation of the read main bit line in the output latch is completed,and the transmitted memory cell data is amplified and latched, as shownin FIG. 32.

In accordance with the activation of the sense amplifier, the resetsignal, rstqdbend, attains to the H level, flip-flop 234 is releasedfrom the forced reset state, and is made ready for the reset of theinternal node of the output latch in response to the reset of the readmain bit line. Here, the reset signal, rstqdbend, may be adapted toattain to the H level when the main bit line precharge signal, mblpcn,attains to the L level.

The internal data reading of the read main bit line and data transferinside the output latch circuit are performed, and the internal outputdata is output from the output buffer.

When reading of the internal data is completed and sense amplifieractivation is completed, the monitor signal MSAE is inactivated inresponse. Then, the main bit line precharge signal, mblpcn, from mainbit line precharge control signal generating circuit 228 rises to the Hlevel in response, and the precharge of the read main bit line in theoutput latch is executed again.

In accordance with the sense amplifier activating signal generatedcorresponding to the monitor signal MSAE, the address latch circuit isreset and the decoder circuit is reset, and the selection signals,selbootk and selbootj, are reset to the H level. In response, theselection signals, selk and selj, are reset to the H level and L level,respectively.

The output buffer reset end signal, rstqdbend, is at the H level. Inresponse to the rise of the main bit line precharge signal mblpcn, anL-level one shot pulse is generated from one shot pulse generatingcircuit 232, flip-flop 234 is set, the output signal of inverter 236attains to the H level, the reset signal, rstqdbend, attains to the Llevel in response, and the internal node of the output latch is reset.As shown in FIG. 32, after the delay time of delay stage 201 from whenthe reset signal, rstqdbend, attains to the L level, the output signalof AND gate 201 attains to the H level, and internal nodes 210 and 212are reset. In response, the output signal from output buffer 74 is alsoinitialized.

The reset signal, rstqdbend, is reset to the H level, after the resetsignal rstqdbn attains to the L level, in accordance with detection of achange in the main bit line precharge signal mblpcn or with detection ofthe predecoded address changing into the reset state, or at a prescribedtiming.

Therefore, in output control circuit 33, the read main bit lineprecharge signal, mblpcn, and the output latch reset signal, rstqdbn,are activated and inactivated in accordance with activation/inactivationof the monitor signal MSAE, and accordingly, the internal read data canbe amplified and latched at the timing when the internal read data hasbeen transmitted to the output latch through the read main bit line.Hence, the output latch and the output buffer can be reset reliablyafter the end of amplification and latching of the internal read data.

FIG. 35 schematically shows the specific construction of the memoryarray and the arrangement of the sense amplifiers. Memory blocks MBA andMBB each include four trains of memory mats. Specifically, memory blockMBA includes memory mat trains MUA0, MLA0, MUA1 and MLA1, while memoryblock MBB includes memory mat trains MUB0, MLB0, MUB1 and MLB1.

The memory array further includes a memory block MBC for storing specialdata. The memory block includes a special data storage region forstoring data such as activation program information including a bootprogram, and a redundant memory cell arrangement region for arrangingredundant memory cells for redundancy replacement. Memory block MBCincludes memory mat trains MUC0 and MLC0.

Each of the memory mat trains MUA0-MLC0 includes four memory mats, asshown in the previous described second embodiment. For one memory block,an X decoder for selecting 1024 control gate lines is arranged, andtherefore, in each memory mat train, 256 control gate lines arearranged.

Between these mat trains, a sense amplifier band including senseamplifier circuits, a read buffer and a reference current supplyingcircuit are arranged. Specifically, between memory mat trains MUA0 andMLA0, a sense amplifier band SAL0 is arranged, and between memory mattrains MUA1 and MLA1, a sense amplifier band SAL1 is arranged. Betweenmemory mat trains MUB0 and MLB0, a sense amplifier band SAL2 isarranged, and between memory mat trains MUB1 and MLB1, a sense amplifierband SAL3 is arranged. Between memory mat trains MUC0 and MLC0, a senseamplifier band SALb is arranged.

For the sense amplifier bands SAL0-SAL3 and SALb, sense amplifiercontrol circuits 60A0, 60A1, 60B0, 60B1 and 60C are provided,respectively, and from corresponding sense amplifier control circuits,the sense amplifier activating signals sae0-sae3 and saeb are applied tothe respective sense amplifier bands SAL0-SAL3 and SALb.

Sense amplifier control circuits 60A0-60C generate monitor signalsmsaen0-msaen3 and msaenb in correspondence to the sense amplifieractivating signals sae0-sae3 and saeb, and transfer the monitor signalsto output control circuit 7.

In internal data reading, one sense amplifier band is selected andsensing operation is performed. The flight time of the internal readdata transferred from the selected sense amplifier band to output latchcircuit 7 differs dependent on the position of the selected senseamplifier band. However, the time for the internal read data generatedby the selected sense amplifier band to be transferred to reach theoutput latch circuit 6 is substantially the same as the transfer time ofthe monitor signal, msaen, from the sense amplifier control circuitcorresponding to the selected sense amplifier band to the output controlcircuit 7.

As for the Y decoder, a construction similar to that of Y decoder shownin FIG. 31 is arranged corresponding to each sense amplifier band,similar to the sense amplifier control circuit. For the selected memorymat train (selected sense amplifier band), the subbit line selectionsignal and the common bit line selection signal are output, and in theunselected sense amplifier band, the subbit line and the common bit lineare not selected. Further, the reference current supplying circuit isalso kept at the unselected state for the unselected memory mat train.Selection of the memory mat train is performed in accordance with thepredecode memory block selection signal. Similar to the Y decoder, the Yaddress latch circuit may be arranged corresponding to each senseamplifier band, that is, each of Y decoder. The X decoder is required toselect 1024 control gate lines and is arranged for each memory block. Itis noted that the X decoder is naturally arranged corresponding to eachmemory mat train as in the first embodiment.

FIG. 36 schematically shows a data transmission path from one senseamplifier circuit SA to output latch 72 and output buffer 74.

Referring to FIG. 36, to the sense amplifier circuit SA, memory cellsMCj and MCk are coupled, and sensing and detection of the memory celldata are performed in accordance with the sense amplifier activatingsignal sae. The output signal from sense amplifier circuit SA istransmitted through sense output lines Ibj and Ibk to a sense readbuffer 70. The sense read buffer 70 is activated in accordance with acomplementary sense amplifier activating signal (saeb: inverted signalof sense amplifier activating signal sae) as shown in FIG. 22, andamplifies the signals on sense output lines Ibj and Ibk and transmitsthe resultant signals to the read main bit lines rmblj and rmblk.

Output latch 72 amplifies and latches the signals on read main bit linesrmblj and rmblk, when activated. In output latch 72, in accordance withthe selected memory mat designating signal selk and selj,switch/non-switch of that transmission path of the internal read data(inversion/non-inversion of internal read data) is selectivelyperformed.

Output buffer 74 generates a single end internal read data q inaccordance with one of the complementary signals transmitted by outputlatch 72. Specifically, when the data of memory cell MCk is to be read,output buffer 74 generates the internal read data q in accordance withthe data on the read main bit line rmblk. When data of memory cell MCjis to be read, output buffer 74 generates the internal read data q basedon the data of the read main bit line rmblj.

Parallel to the transfer of the internal read data, a monitor signalmsaen (MSAE) is generated at the same timing as the sense amplifieractivating signal sae and transferred to the output control circuit. Inoutput control circuit 7, the main bit line precharge signal, mblpc, andthe output reset signal, rstqdbn, are generated in accordance with themonitor signal, msaen.

Therefore, the data propagation time of the path from activation of thesense amplifier activating signal, sae, through sensing operation of thesense amplifier circuit SA and transmission of the internal read data issubstantially the same as the signal propagation time of monitor signalmsaen. Therefore, the state of reading of the internal read data can bemonitored by the monitor signal, msaen. By resetting the output latch inaccordance with the monitor signal msaen, activation/inactivation ofoutput latch 72 and output buffer 74 can be controlled in accordancewith the state of transmission of internal read data (state of readingof internal read data).

FIG. 37 is a timing diagram representing an operation of the internalread data transmitting path shown in FIG. 36. Referring to FIG. 37, whenthe sense amplifier activating signal, sae, is activated, the monitorsignal, msaen, is also activated and transmitted to output controlcircuit (7). In accordance with activation of the sense amplifieractivating signal, sae, the internal read data is transmitted to readmain bit lines rmblj and rmblk, and then transmitted to output latchcircuit 72.

The propagation time of the internal read data to output latch 72 issubstantially the same as the propagation time of monitor signal, msaen,to the output control circuit. In accordance with the monitor signal,msaen, the reset signal QRST is generated in output control circuit 7,so as to control activation/inactivation and particularly, resetting tothe initial state, of output latch 72 and output buffer 74.

Therefore, even when the position of the selected memory mat train(sense amplifier band) is different and the propagation time of theinternal read data is different, the reset signal QRST can be activatedaccurately in output control circuit 7, in accordance with the state ofinternal data reading in output latch 72 and output buffer 74.Activation of the reset signal QRST is performed in accordance with thestate of propagation of the internal read data (state of internal datareading), and the time period of holding the internal read data q offrom output buffer 74 changes in accordance with the arrival time of theinternal read data. Therefore, no matter whether the arrival time of theinternal read data is early or late at output buffer 74, the dataholding time can be made substantially constant to Th.

By way of example, assume that the reset timing of output latch 72 andoutput buffer 74 is set fixedly for the latest arrival time of the readdata, considering the operation margin. In this case, the internal readdata may possibly be reset at a faster timing and the reset data wouldbe read, that is, erroneous data would be read. Further, by sucherroneously read data, the signal potential of the internal read datachanges, to cause a crosstalk on the internal output bus, resulting inan erroneous reading. When resetting of output latch 72 and outputbuffer 74 is controlled in accordance with the state of data reading,the output control phase can be set reliably in accordance with thestate of reading of the internal read data, and hence, the internal datacan be read accurately.

Further, it is unnecessary to set the reset timing fixedly for theearliest arrival time of the internal read data in order to preventpossible erroneous reading caused by resetting. Therefore, sufficientlylong data holding time can be ensured, and the operation margin can beenlarged.

As described above, according to the fifth embodiment, resetting of theoutput latch circuit and completion of resetting of the read main bitline are controlled in accordance with the state of reading of theinternal data, and therefore, the output control phase can automaticallybe set in accordance with the state of reading of the internal data, andoperation margin can be enlarged.

Sixth Embodiment

FIG. 38 schematically shows a construction of a non-volatilesemiconductor memory device in accordance with the sixth embodiment ofthe present invention. In the non-volatile semiconductor memory deviceshown in FIG. 38, a predecoder 300 for predecoding an address signalfrom address input circuit 2 and an address latch circuit 400 forlatching an output signal of predecoder 300 are provided commonly tomemory blocks MBA and MBB. Decode circuits 5A and 5B are arrangedcorresponding to memory blocks MBA and MBB, respectively. Except forthese points, the construction of non-volatile semiconductor memorydevice shown in FIG. 38 is the same as that of non-volatilesemiconductor memory device shown in FIG. 1, and therefore,corresponding portions are denoted by the same reference characters anddescription thereof will not be repeated.

In the construction of non-volatile semiconductor memory device shown inFIG. 38, predecoder 300 generates a block predecoded signal specifyingmemory blocks MBA and MBB, and in accordance with the block specifyingpredecoded signal latched by address latch circuit 400, one of decodecircuits 5A and 5B is activated to perform the decoding operation.

Decode circuits 5A and 5B each include X decoders 12 u and 12 l and Ydecoder 13 shown in FIG. 5, and after activation of the sense amplifier,the decoding operation thereof is reset. Further, after the activationof the sense amplifier, latch address of address latch circuit 400 isreset.

Further, output control circuit 7 monitors the state of reading of theinternal read data, and in accordance with the results of monitoring,sets/resets the output latch circuit 6 selectively.

In the case when the internal state can be initialized with sufficientmargin before the start of the next read cycle due to the resetting ofthe internal circuitry being performed based on the sense amplifieractivating signal, the read cycle time can be made shorter by latchingthe predecoded signal by address latch circuit 400, even in theconstruction having predecoder 300 and address latch circuit 400provided commonly to memory blocks MBA and MBB.

Specifically, as shown in FIG. 39, when the internal address istransmitted from address input circuit 2 in accordance with the clocksignal CKM (CLK) and the predecoded signal is output from predecoder300, if there is a skew in the output signal of predecoder 300 resultingfrom variation (skew) in signal propagation delay from address inputcircuit 2, the output signal of address latch circuit 400 is setconsidering the worst case to be driven to the definite state. After theoutput signal of address latch circuit 400 is made definite and settled,the sense amplifier activating signal, sae, is activated at a prescribedtiming, address latch circuit 400 is reset in response, and decodecircuit 5A or 5B is reset.

Here, the time Ts before the start of the next read cycle afterresetting of address latch circuit 400 can be made sufficiently long,and the next read cycle can be started from the initial state. At thestart of internal data reading operation, the state change of theinternal signal occurs always in one direction. Among the signals of thesame kind such as the subbit line selection signals, change to theunselected state and change to the selected state do not occur inparallel, and therefore, driving to the data reading state can befinished quickly. Thus, latching and decoding of the address signal canbe performed with sufficient margin in the next read cycle.

In accordance with the monitor signal of sense amplifier activatingsignal, sae, the output data bit, q, is output from output latch circuit6. From selector 9, data Q is output in synchronization with the clocksignal CKM (or CLK), or the data is output at such a timing that theoutput data Q is made definite at the timing of the rise of clock signalCKM.

Therefore, even when there is a skew resulting from variation ininternal address signal propagation delay in the output signal ofpredecoder 300, the read cycle time Tcycle can be made shorter, andhigh-speed reading can be achieved.

In the construction shown in FIG. 38, predecoder 300 and address latchcircuit 400 can be provided commonly to memory blocks MBA and MBB, sothat the area occupied by the circuits can be reduced, and currentconsumption can be reduced.

In the construction shown in FIG. 38 also, resetting process of addresslatch circuit 400 and decode circuits 5A and 5B may be configured to bestopped in the test mode.

Further, even when a plurality of sense amplifier bands are arranged inone memory block, similar effects can be obtained by arranging the Ydecode circuit in correspondence with each sense amplifier band, indecode circuits 5A and 5B.

The present invention provides high-speed reading when applied to ageneral non-volatile semiconductor memory device such as a flash memory.The non-volatile semiconductor memory device is not limited to an MONOStype non-volatile semiconductor memory and other MNOS(Metal-Nitride-Oxide-Semiconductor) type memory, a magnetic memoryutilizing variable magnetic resistance element, phase change memoryusing a phase change element or non-volatile semiconductor memorydevices of other construction may be used.

Further, the construction of the circuitry related to data reading inaccordance with the present invention is applicable not only to thenon-volatile semiconductor memory devices but also to a volatilesemiconductor memory devices such as an SRAM (Static Random AccessMemory).

Although the present invention has been described and illustrated indetail, it is clearly understood that the same is by way of illustrationand example only and is not to be taken by way of limitation, the spiritand scope of the present invention being limited only by the terms ofthe appended claims.

1-7. (canceled)
 8. A semiconductor memory device, comprising: a memoryarray having a plurality of memory cells arranged in of rows andcolumns; address latch circuitry for latching an address signaldesignating a memory cell of said memory array; cell selecting circuitryfor selecting an addressed memory cell of said memory array inaccordance with a latched address signal of said address latchcircuitry, said cell selecting circuitry resetting said address latchcircuitry to an initial state after selection of said memory cell in adata read mode of operation; and data reading circuitry for reading dataof the memory cell selected by said cell selecting circuitry forgenerating an internal data in said data read mode of operation.
 9. Thesemiconductor memory device according to claim 8, wherein said cellselecting circuitry resets said cell selecting circuitry concurrentlywith the resetting of said address latch circuitry, after the selectionof said memory cell.
 10. The semiconductor memory device according toclaim 8, wherein said cell selecting circuitry stops an operation ofsaid resetting, when a test mode is set.
 11. The semiconductor memorydevice according to claim 8, further comprising: a data output circuitfor generating an internal output data from the internal data receivedfrom said data reading circuitry; and an output control circuit formonitoring a state of data reading from said data reading circuitry, andresetting said data output circuit in accordance with the monitoredstate.
 12. The semiconductor memory device according to claim 11,wherein said data output circuit includes a data latch circuit forlatching the internal data received from said data reading circuitry;and said data output control circuit resets said data output circuit inresponse to a monitor signal generated in accordance with an activatingsignal controlling activation of said data reading circuitry.
 13. Thesemiconductor memory device according to claim 11, wherein said outputcontrol circuit receives a monitor signal through a signal lineproviding a signal propagation delay corresponding to signal propagationdelay of a signal propagation path from said data reading circuitry tosaid data output circuit, and resets said data output circuit inaccordance with the received monitor signal, said monitor signal beinggenerated in correspondence to an activating signal activating said datareading circuitry. 14-15. (canceled)